3D Nanowire SRAM Cell Layout for Speed-Stability Balance
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Solution Overview
Problem
Existing layouts of 1-port SRAM cells using three-dimensional transistors do not consider the configuration of six transistors with different numbers of nanowire transistors, which affects the performance ratio of operation speed and stability.
Innovation Solution
A semiconductor memory device with a 1-port SRAM cell configuration where six transistors are configured using different numbers of nanowire transistors, with specific connections and overlapping structures to optimize layout and reduce area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If six transistors are configured using the same number of nanowire transistors, then the layout is simple and manufacturing is easier, but the performance ratio of operation speed and stability cannot be optimized
Solution Approach 1:
The patent applies local quality by configuring different numbers of nanowire transistors for different transistor positions within the SRAM cell. Specifically, the first and second transistors use one nanowire transistor each, while the third and fourth transistors use two nanowire transistors each, and the fifth and sixth transistors use one nanowire transistor each. This non-uniform configuration optimizes the performance ratio of operation speed and stability for each transistor based on its specific functional requirements within the circuit.
Solution Approach 2:
The patent segments the SRAM cell into six distinct transistor units, each with independently configured nanowire transistor counts. This segmentation allows each transistor to be optimized separately according to its specific performance requirements, rather than using a uniform configuration for all transistors.
2Reliability
If more nanowire transistors are used for each transistor, then the operation speed and stability improve, but the cell area increases
Solution Approach 1:
The patent implements local quality by selectively increasing the nanowire transistor count only where needed for performance optimization. The third and fourth transistors use two nanowire transistors each to achieve the required performance ratio, while the other transistors use one nanowire transistor each. This targeted approach improves operation stability without proportionally increasing the total cell area.
Solution Approach 2:
The patent applies partial action by using exactly the number of nanowire transistors needed for each transistor position. Rather than uniformly increasing the nanowire count for all transistors, the invention uses additional nanowire transistors only for the third and fourth transistors where performance optimization is required, avoiding unnecessary area expansion.
3Productivity
If the number of nanowire transistors is optimized for performance, then operation speed and stability improve, but the manufacturing precision requirements increase
Solution Approach 1:
The patent applies local quality by configuring different numbers of nanowire transistors for different transistor positions based on their specific performance requirements. The first and second transistors use one nanowire transistor each, while the third and fourth transistors use two nanowire transistors each, and the fifth and sixth transistors use one nanowire transistor each. This targeted configuration optimizes operation speed and stability while managing manufacturing precision requirements through systematic design.
Data Source
AI summary
Transistors (N3, N4) corresponding to a drive transistor (PD1), transistors (N5, N6) corresponding to a drive transistor (PD2), transistors (N7, N8) corresponding to an access transistor (PG1), and transistors (N1, N2) corresponding to an access transistor (PG2) are formed in a lower portion of a cell. Transistors (P1, P2) corresponding to load transistors (PU1, PU2), respectively, are formed in an upper portion of the cell. Further, the transistors (P1, P2) overlap the transistors (N3, N6) in plan view.


