3D Nanowire SRAM Cell Layout for Speed-Stability Balance

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Solution Overview

Problem

Existing layouts of 1-port SRAM cells using three-dimensional transistors do not consider the configuration of six transistors with different numbers of nanowire transistors, which affects the performance ratio of operation speed and stability.

Innovation Solution

A semiconductor memory device with a 1-port SRAM cell configuration where six transistors are configured using different numbers of nanowire transistors, with specific connections and overlapping structures to optimize layout and reduce area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If six transistors are configured using the same number of nanowire transistors, then the layout is simple and manufacturing is easier, but the performance ratio of operation speed and stability cannot be optimized

Engineering Contradiction:
Improveoperation stabilityVSAvoidlayout configuration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by configuring different numbers of nanowire transistors for different transistor positions within the SRAM cell. Specifically, the first and second transistors use one nanowire transistor each, while the third and fourth transistors use two nanowire transistors each, and the fifth and sixth transistors use one nanowire transistor each. This non-uniform configuration optimizes the performance ratio of operation speed and stability for each transistor based on its specific functional requirements within the circuit.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent segments the SRAM cell into six distinct transistor units, each with independently configured nanowire transistor counts. This segmentation allows each transistor to be optimized separately according to its specific performance requirements, rather than using a uniform configuration for all transistors.

Inventive Principle:
Principle #1Segmentation

2Reliability

If more nanowire transistors are used for each transistor, then the operation speed and stability improve, but the cell area increases

Engineering Contradiction:
Improveoperation stabilityVSAvoidSRAM cell area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent implements local quality by selectively increasing the nanowire transistor count only where needed for performance optimization. The third and fourth transistors use two nanowire transistors each to achieve the required performance ratio, while the other transistors use one nanowire transistor each. This targeted approach improves operation stability without proportionally increasing the total cell area.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent applies partial action by using exactly the number of nanowire transistors needed for each transistor position. Rather than uniformly increasing the nanowire count for all transistors, the invention uses additional nanowire transistors only for the third and fourth transistors where performance optimization is required, avoiding unnecessary area expansion.

Inventive Principle:
Principle #16Partial or excessive action

3Productivity

If the number of nanowire transistors is optimized for performance, then operation speed and stability improve, but the manufacturing precision requirements increase

Engineering Contradiction:
Improveoperation speedVSAvoidnanowire transistor configuration precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by configuring different numbers of nanowire transistors for different transistor positions based on their specific performance requirements. The first and second transistors use one nanowire transistor each, while the third and fourth transistors use two nanowire transistors each, and the fifth and sixth transistors use one nanowire transistor each. This targeted configuration optimizes operation speed and stability while managing manufacturing precision requirements through systematic design.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS12213298B2Semiconductor storage device comprising a one-port SRAM cell formed with three dimensional transistors
Publication Date: 2025.01.28 SOCIONEXT INC
  • US12213298B2 patent drawing
  • US12213298B2 patent drawing
  • US12213298B2 patent drawing

AI summary

Transistors (N3, N4) corresponding to a drive transistor (PD1), transistors (N5, N6) corresponding to a drive transistor (PD2), transistors (N7, N8) corresponding to an access transistor (PG1), and transistors (N1, N2) corresponding to an access transistor (PG2) are formed in a lower portion of a cell. Transistors (P1, P2) corresponding to load transistors (PU1, PU2), respectively, are formed in an upper portion of the cell. Further, the transistors (P1, P2) overlap the transistors (N3, N6) in plan view.