3D Surface Characterization via Multi-Plane Interferometry
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Solution Overview
Problem
Current methods for three-dimensional surface characterization face challenges in achieving a balance between coverage area, spatial resolution, characterization speed, and budget, with existing technologies often compromising on one or more of these aspects.
Innovation Solution
A method involving multiple measurement planes with interferometric sensors and image sensors that acquire distance data and three-dimensional images simultaneously, allowing for comprehensive surface characterization with high spatial resolution (less than 10 nm) over a wide area (360°) within a short time frame (30 minutes or less), while maintaining cost-effectiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If traditional single-plane characterization methods are used, then device complexity and budget are reduced, but coverage area is limited and cannot achieve 360° characterization
Solution Approach 1:
The characterization system is divided into multiple independent measurement planes (at least two), each equipped with its own distance sensors. This segmentation allows each plane to capture a specific angular sector, and when combined, they provide complete 360° coverage without requiring a single complex all-encompassing sensor array.
Solution Approach 2:
The system transitions from single-plane two-dimensional scanning to multi-plane three-dimensional simultaneous measurement. By adding the vertical dimension (multiple planes at different heights), the system achieves comprehensive 360° coverage and full surface characterization without increasing rotational complexity.
2Measurement precision
If high spatial resolution (less than 10 nm) is achieved through repeated measurements, then measurement precision is improved, but characterization time increases beyond 30 minutes
Solution Approach 1:
Multiple distance sensors are pre-positioned at different angular locations around the object in each measurement plane. This preliminary arrangement allows simultaneous acquisition of distance data from multiple points around the entire object, eliminating the need for sequential repeated measurements to achieve complete surface coverage and high resolution.
Solution Approach 2:
The system performs continuous simultaneous measurements across multiple measurement planes and multiple angular positions. All sensors operate concurrently to capture distance data, contour information, and 3D images in one continuous operation, achieving high spatial resolution within 30 minutes rather than through prolonged sequential scanning.
3Measurement precision
If multiple measurement planes with multiple sensors are deployed, then measurement precision and coverage are improved, but budget increases significantly
Solution Approach 1:
Each measurement plane is designed as a multi-functional unit that simultaneously performs distance measurement, contour line extraction, and 3D image acquisition. The distance sensors and image sensors work together in each plane to achieve comprehensive characterization, reducing the need for separate specialized devices and lowering overall system cost.
Solution Approach 2:
The system merges distance sensing capabilities and image sensing capabilities into an integrated multi-plane characterization system. By combining these functions across multiple planes and processing the data together through contour line analysis and 3D image assembly, the system achieves high precision characterization at a lower total cost than using separate high-end specialized instruments.
4Area of stationary object
If the object is rotated for complete characterization, then coverage area is improved, but the axis of rotation stability becomes critical and difficult to maintain
Solution Approach 1:
Instead of relying on a single rotational axis, the system segments the measurement into multiple fixed planes at different angular positions. This eliminates the need for precise rotational stability during measurement, as each plane captures data from its fixed position, and the complete 360° coverage is achieved through the combination of multiple planes rather than rotation.
Solution Approach 2:
The system accommodates dynamic variations in the object's position and orientation by using multiple measurement planes that capture data from different angles simultaneously. The contour line extraction algorithm dynamically adjusts to variations in axis inclination and translation, allowing the system to maintain measurement accuracy even when the object's rotational position varies during acquisition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise, rapid, and cost-effective three-dimensional surface characterization, providing detailed contour data with high spatial resolution and wide coverage, effectively addressing the limitations of existing technologies.
Implementation Method 1
each measurement plane being equipped with at least three distance sensors surrounding the object... a measurement of a distance datum representative of a distance between an exterior surface of the object and this distance sensor
Data Source
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AI summary
The present invention concerns a method for the three-dimensional characterisation of an object (5), comprising: - acquiring distance data on two separate measurement planes (81, 82), by at least three interferometric distance sensors (71, 72) per measurement plane and for several values of rotation of the object about an axis of rotation (4); and, for each measurement plane, obtaining data representative of a contour line (14) of the object from the distance data; - for one of the measurement planes, acquiring, by an image sensor (151), a three-dimensional image of one face of the object (5) and repeating this image acquisition for several values of rotation of the object (5) about the axis of rotation (4) of same; and assembling various three-dimensional images acquired for this measurement plane (81), so as to obtain three-dimensional data of a contour surface of the object, the assembly comprising a definition of relative positions of the various images by means of the data representative of the contour line (14) contained in this measurement plane (81).