3D Transformer Structure for High Q-Factor RF Circuits

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Solution Overview

Problem

Current on-chip inductor designs for RF circuits face challenges in achieving high Q-factor and self-resonance frequency while minimizing occupied area, which is crucial for high-frequency applications like mobile communications.

Innovation Solution

The development of a three-dimensional transformer structure with multiple metal layers, where the primary and secondary coils are wound in the same direction, and radial wiring channels provide external connections, optimizing ohmic and eddy current losses, and featuring series-parallel interconnections for higher impedance transformation ratios.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If traditional planar inductor designs are used, then the occupied area is large, but the Q-factor and self-resonance frequency are limited

Engineering Contradiction:
Improveoccupied areaVSAvoidQ-factor
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The patent transitions from traditional planar (2D) inductor designs to a three-dimensional stacked configuration where multiple inductor layers are vertically arranged and interconnected through via holes. This vertical stacking enables the inductor to achieve higher Q-factor and self-resonance frequency while occupying less chip area, as the effective inductance is increased through the third dimension without proportionally increasing the planar footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If coil track width is increased to reduce resistance, then Q-factor improves, but occupied area increases

Engineering Contradiction:
ImproveQ-factorVSAvoidoccupied area
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

Instead of increasing coil track width in the planar direction to reduce resistance, the patent implements multiple inductor layers stacked vertically, each contributing to the total inductance. The via holes provide low-resistance vertical interconnections between layers, effectively reducing overall resistance without requiring wider tracks in any single layer, thus maintaining compact area while improving Q-factor.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If high-resistivity substrate is used to reduce metal-to-substrate capacitance, then self-resonance frequency increases, but manufacturing complexity increases

Engineering Contradiction:
Improveself-resonance frequencyVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent achieves reduced metal-to-substrate capacitance effect by elevating the inductor structure into the third dimension with multiple stacked layers. This vertical configuration increases the effective distance between the inductor windings and the substrate, thereby reducing parasitic capacitance without requiring high-resistivity substrates, thus maintaining standard manufacturing processes while achieving high self-resonance frequency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Area of moving object

If multiple metal layers are stacked vertically, then occupied area is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improveoccupied areaVSAvoidalignment precision
Core Design Contradiction:
Area of moving objectVSManufacturing precision

Solution Approach 1:

The patent implements a stacked inductor configuration using standard multi-layer PCB or semiconductor fabrication techniques. The via holes providing vertical interconnections are designed with appropriate diameter and spacing to ensure mechanical and electrical alignment between layers. Standard fabrication tolerances are sufficient to achieve the required alignment precision, making the manufacturing process compatible with existing industrial capabilities while achieving compact area occupation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design achieves reduced occupied area, higher efficiency, and increased power gain, specifically benefiting high-frequency applications by enhancing the Q-factor and self-resonance frequency, thus improving the performance of RF circuits.

Implementation Method 1

On-chip transformers are formed from inductor-like structures. On-chip transformers are needed in radiofrequency (RF) circuits for a number of functions including impedance transformation, differential to single conversion and vice versa (balun), DC isolation and bandwidth enhancement

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

where L is the inductance value of the inductor and C may be the capacitance value associated with the inductor coil's inter-winding capacitance

Methodology Applied
Scientific EffectMagnetic field generation: Magnetic Field

Data Source

PatentUS9831026B2High efficiency on-chip 3D transformer structure
Publication Date: 2017.11.28 GLOBALFOUNDRIES US INC
  • US9831026B2 patent drawing
  • US9831026B2 patent drawing
  • US9831026B2 patent drawing

AI summary

A transformer structure includes at least three sections, each corresponding to metal layers of an integrated circuit. A first section of the at least three sections is electrically coupled to a third section with a second section disposed between the first and third sections. The at least three sections includes inductor coils, all of which are wound in a same direction and voltage phase starting at an outer terminal and continuing to an inner terminal of each inductor coil. At least one radial wiring channel passes through a portion of a coil in one of the three sections to provide an external connection to an internal terminal of the coil in at least one of the three sections.