3DIC Package Thermal Path for Inner-Die Hot Spot Dissipation

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Solution Overview

Problem

Three-Dimensional Integrated Circuits (3DICs) face challenges in heat dissipation due to non-conductive materials between stacked dies, leading to localized temperature peaks (hot spots) that affect electrical performance and reliability.

Innovation Solution

The implementation of a package with efficient hot spot thermal management features, including a substrate with conductive layers and high thermal conductivity materials, along with a contour ring and lid for effective heat dissipation, to conduct heat away from the die stack to peripheral areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If stacked dies are bonded through bonding to form 3DICs, then integration density is improved, but heat dissipation capability deteriorates due to non-conductive materials trapping heat in inner regions

Engineering Contradiction:
Improveintegration densityVSAvoidheat dissipation capability
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

A thermal management die is introduced as an intermediary component between the stacked dies and the heat spreader. This intermediate layer contains thermal management devices that actively pump heat from inner die regions through conductive paths to peripheral areas, overcoming the heat trapping effect of non-conductive materials while preserving the stacked die configuration

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The thermal management die incorporates localized thermal management devices positioned specifically over inner die regions where heat traps form. These devices create localized heat pumping paths that address the specific thermal problem in inner regions without affecting the overall stacked die structure or requiring changes to the non-conductive bonding materials

Inventive Principle:
Principle #3Local quality

2Reliability

If non-conductive materials such as underfill and molding compound are used between stacked dies, then electrical isolation is improved, but thermal conduction capability deteriorates causing hot spots

Engineering Contradiction:
Improveelectrical isolationVSAvoidthermal conduction capability
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The thermal management die segments the heat flow path by creating separate conductive channels through its structure. Thermal management devices are positioned to intercept heat from specific inner die regions and channel it through dedicated conductive paths to peripheral heat spreader areas, bypassing the non-conductive materials that would otherwise trap the heat

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The thermal management die acts as a mediator layer that bridges the electrical isolation provided by non-conductive materials and the thermal conduction needed to prevent hot spots. It contains embedded conductive elements that create thermal pathways without compromising the electrical isolation function of the underfill and molding compound

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If heat is trapped in inner regions of bottom stacked die, then device integration is simplified, but hot spot formation increases affecting electrical performance and reliability

Engineering Contradiction:
Improvedevice integrationVSAvoidhot spot formation
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The thermal management devices are positioned in advance over inner die regions before heat generation occurs during operation. This preliminary positioning of thermal management elements allows proactive heat interception and redirection through conductive paths, preventing hot spot formation before it affects electrical performance

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

A thermal management die is introduced as an intermediate layer between the bottom stacked die and the heat spreader. This intermediate structure contains thermal management devices that actively manage heat flow from inner regions, preventing hot spot formation without requiring changes to the underlying die integration structure

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces operation temperatures and minimizes the impact of hot spots on overlaying devices, enhancing the thermal management and reliability of 3DICs by efficiently dissipating heat to peripheral regions.

Implementation Method 1

high thermal conductivity material is disposed over the substrate and contacting the exposed portion of the conductive layer

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20240222218A13DIC packaging with hot spot thermal management features
Publication Date: 2024.07.04 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240222218A1 patent drawing
  • US20240222218A1 patent drawing
  • US20240222218A1 patent drawing

AI summary

A package includes a substrate having a conductive layer, and the conductive layer comprises an exposed portion. A die stack is disposed over the substrate and electrically connected to the conductive layer. A high thermal conductivity material is disposed over the substrate and contacting the exposed portion of the conductive layer. The package further includes a contour ring over and contacting the high thermal conductivity material.