Abatement Operating Control for PFC Destruction and Low NOx
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Solution Overview
Problem
Existing abatement apparatuses struggle to efficiently remove perfluorinated compounds (PFCs) from effluent gas streams while minimizing the generation of NOx and optimizing resource consumption.
Innovation Solution
A method and apparatus that adjust operating parameters such as temperature and oxidizing/reducing environment based on real-time PFC concentration measurements, using a controller to optimize conditions for efficient PFC destruction and reduce unwanted by-products and resource use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the temperature in the abatement apparatus is increased to improve PFC abatement efficiency, then the PFC destruction rate improves, but the NOx generation increases
Solution Approach 1:
The patent applies dynamics by making the operating parameters (temperature, air flow rate, fuel flow rate) adjustable and controllable in real-time. The controller dynamically modifies these parameters based on process conditions to optimize PFC abatement while minimizing NOx generation, rather than operating at a fixed high temperature that would always produce high NOx.
Solution Approach 2:
The patent changes operating parameters (temperature, air flow rate, fuel flow rate) to optimize the abatement process. By adjusting these parameters based on real-time monitoring and control, the system achieves high PFC destruction efficiency while maintaining NOx generation within acceptable limits, resolving the contradiction between abatement efficiency and harmful emissions.
2Reliability
If the temperature is increased to achieve better PFC destruction, then the PFC concentration in exhaust decreases, but the energy consumption increases
Solution Approach 1:
The system dynamically adjusts the temperature and other operating parameters based on real-time process conditions. Rather than maintaining a constantly high temperature that would consume excessive energy, the controller modifies parameters to achieve the required PFC destruction efficiency while minimizing energy consumption through optimal operating conditions.
Solution Approach 2:
By changing operating parameters (temperature, air flow rate, fuel flow rate) in response to process conditions, the system achieves efficient PFC destruction at lower energy consumption. The controller optimizes the balance between destruction efficiency and energy use by adjusting parameters rather than operating at maximum temperature continuously.
3Reliability
If the air flow rate is increased to improve PFC abatement, then the PFC concentration in exhaust decreases, but the NOx generation increases
Solution Approach 1:
The controller dynamically adjusts the air flow rate in real-time based on process conditions. Rather than operating at a fixed high air flow rate that would always produce high NOx, the system modifies the air flow rate to achieve optimal PFC abatement while minimizing NOx generation through coordinated adjustment with fuel flow rate and temperature.
Solution Approach 2:
The patent changes the air flow rate parameter in response to process conditions to optimize the abatement process. By coordinating changes in air flow rate with fuel flow rate and temperature, the system achieves high PFC destruction efficiency while maintaining NOx generation at acceptable levels through optimal parameter combinations.
4Temperature
If the fuel flow rate is increased to maintain combustion temperature, then the temperature remains high for PFC destruction, but the resource consumption increases
Solution Approach 1:
The controller dynamically adjusts the fuel flow rate based on real-time process conditions and PFC concentration levels. Rather than maintaining a constantly high fuel flow rate to ensure high temperature, the system modifies the fuel flow rate to maintain only the necessary temperature for effective PFC destruction, thereby reducing fuel consumption while meeting abatement requirements.
Solution Approach 2:
The patent changes the fuel flow rate parameter in response to process conditions to optimize combustion efficiency. By coordinating fuel flow rate changes with air flow rate and temperature control, the system maintains sufficient combustion temperature for PFC destruction while minimizing fuel consumption through optimal parameter settings.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Achieves targeted PFC destruction efficiency (DRE) while minimizing NOx generation and resource consumption by dynamically adjusting operating conditions in response to PFC concentration changes.
Implementation Method 1
Known abatement apparatus such as radiant burners use combustion to remove the PFCs and other compounds from the effluent gas stream
Implementation Method 2
At the temperature required for PFC abatement, NOx is thermally generated from nitrogen and oxygen
Data Source
AI summary
A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.