Aberration Corrector Layout for Flexible Electron Beam Adjustment
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Solution Overview
Problem
In electron microscopes, adjusting parameters other than aberration, such as convergence angle and crossover position, often requires adding lenses, which increases the size and complexity of the apparatus, limiting the degree of freedom in optical system adjustments.
Innovation Solution
A charged particle beam apparatus with a charged particle optical system featuring multipole elements in three or more stages and alternately disposed transfer optical systems, allowing aberration adjustment using specific multipole elements and parameter adjustments using transfer optical systems not between them, enabling flexible operation without increasing apparatus size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a lens is added to the electron optical system to adjust parameters other than aberration, then the degree of freedom in adjusting parameters is improved, but the size of the apparatus increases
Solution Approach 1:
The patent applies multi-functionality by enabling multipole elements to perform both aberration correction and parameter adjustment functions. Specifically, transfer optical systems between multipole elements are utilized to adjust parameters such as convergence angle and crossover position, eliminating the need for separate dedicated lenses and achieving versatile control within the existing aberration corrector structure
Solution Approach 2:
The patent merges the functions of aberration correction and parameter adjustment into a single integrated system. By combining the aberration corrector with parameter adjustment capabilities using the same multipole elements and transfer optical systems, the design consolidates multiple functions into one compact unit, avoiding apparatus expansion
2Adaptability or versatility
If a lens is added to the electron optical system to adjust parameters other than aberration, then the degree of freedom in adjusting parameters is improved, but the device complexity increases
Solution Approach 1:
The patent applies multi-functionality by enabling multipole elements to perform both aberration correction and parameter adjustment functions. Specifically, transfer optical systems between multipole elements are utilized to adjust parameters such as convergence angle and crossover position, eliminating the need for separate dedicated lenses and achieving versatile control within the existing aberration corrector structure
Solution Approach 2:
The patent applies self-service by utilizing the existing transfer optical systems within the aberration corrector for dual purposes. The same optical components that transfer electron beams between multipole elements are also employed to adjust imaging parameters, making the system self-sufficient and avoiding the need for additional independent adjustment mechanisms
Data Source
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AI summary
A method of adjusting a charged particle optical system in a charged particle beam apparatus provided with the charged particle optical system including an aberration corrector in which multipole elements disposed in three or more stages and transfer optical systems are alternately disposed, the method includes adjusting aberration using at least two of the multipole elements without using at least one of the multipole elements, and adjusting parameters of the charged particle optical system other than aberration using at least one of the transfer optical systems that is not disposed between the at least two of the multipole elements used.