Abrasive Articles Conformable Coatings Swarf Build-up
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Abrasive articles used in CMP applications face challenges with swarf build-up on their abrading surfaces, which reduces their effectiveness over time due to adherence of polishing pad material and slurry particles, leading to inconsistent polishing performance.
Innovation Solution
The development of abrasive articles with a hydrophilic surface featuring a ceramic body, a conformable metal oxide coating, and a polar organic-metallic coating, which includes a chemical compound with a metal and an organic moiety having polar functional groups, enhancing anti-fouling and cleaning capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pad conditioner with diamond particle or ceramic abrading layer is used to abrade the polishing pad, then the polishing pad surface can be renewed and consistent polishing performance can be maintained, but swarf build-up occurs on the abrading surface reducing effectiveness over time
Solution Approach 1:
The patent applies parameter changes by modifying the surface energy characteristics of the abrading surface through the application of a low surface energy coating. This coating changes the wettability parameter of the surface from hydrophilic to hydrophobic, preventing swarf particles from adhering to the surface while maintaining the mechanical abrasion capability of the ceramic or diamond particles beneath.
Solution Approach 2:
The invention creates a composite structure by combining the hard ceramic or diamond abrading layer with a low surface energy coating layer. This multi-layer composite allows the underlying abrasive material to perform its cutting function while the outer coating layer provides anti-fouling properties, effectively separating the abrasion function from the anti-adhesion function.
2Object-generated harmful factors
If the abrading surface is made hydrophobic to prevent contamination, then anti-fouling capability is improved, but wettability and cleaning capability are reduced
Solution Approach 1:
The patent inverts the conventional approach by applying a low surface energy coating that creates hydrophobic properties on the abrading surface. Instead of making the surface hydrophilic to prevent fouling, the invention uses hydrophobicity as the anti-fouling mechanism, causing swarf particles to bead up and roll off rather than adhere to the surface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hydrophilic surface design significantly reduces swarf build-up and facilitates easier cleaning, maintaining consistent polishing performance and extending the life of the abrasive articles.
Implementation Method 1
The hydrophilic surface improves wettability of the abrasive article's surface and may lead to enhanced anti-fouling capabilities
Implementation Method 2
a conformable metal oxide coating adjacent to and conforming to the plurality of engineered features
Data Source
AI summary
The present disclosure relates to abrasive articles including conformable coatings, e.g. a hydrophilic coating, and polishing systems therefrom. The present disclosure provides an abrasive article including a ceramic body having an abrading surface and an opposed second surface, wherein the abrading surface of the ceramic body includes a plurality of engineered features each having a base and a distal end opposite the base and the ceramic body has a Mohs hardness of at least 7.5; a conformable metal oxide coating adjacent to and conforming to the plurality of engineered features, wherein the conformable metal oxide coating includes a first surface; and a conformable polar organic-metallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organic-metallic coating includes a chemical compound having at least one metal and an organic moiety having at least one polar functional group.