Absorption Analyzer Tilted Window Sealing
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Solution Overview
Problem
Existing absorption analyzers in semiconductor manufacturing processes are limited in directly measuring analysis target gases within a chamber and are prone to measurement errors due to moisture condensation on window materials, especially when detecting trace amounts of impurities.
Innovation Solution
The absorption analyzer includes a light emission module with a tilted window material and a pressing body to ensure uniform seal compression, preventing moisture condensation by maintaining the window material's temperature through a sheet heater and temperature sensor, and using a resin-made pressing body to prevent heat dissipation and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the window material is cooled to seal the vessel, then the sealing reliability is improved, but moisture condensation occurs on the window material causing measurement errors
Solution Approach 1:
The pressing body is divided into a first pressing portion that contacts the first surface of the window material and a second pressing portion that contacts the second surface, allowing independent control of pressing forces on each side to achieve both sealing and temperature maintenance
Solution Approach 2:
The pressing forces are applied locally at different magnitudes - stronger pressing at the first surface for sealing, and controlled pressing at the second surface to prevent moisture condensation while maintaining measurement accuracy
2Reliability
If the window material is pressed against the base flange to seal the vessel, then the sealing reliability is improved, but the window material temperature decreases causing moisture condensation
Solution Approach 1:
The pressing body acts as an intermediary component between the base flange and the window material, providing controlled pressing force while including a heating element to prevent moisture condensation on the window material surface
Solution Approach 2:
The temperature parameter of the window material is actively controlled by the heating element in the pressing body to maintain it above the dew point, preventing moisture condensation while still achieving adequate sealing pressure
3Ease of manufacture
If a flat window material is used, then the manufacturing simplicity is improved, but light interference occurs affecting measurement accuracy
Solution Approach 1:
The window material is designed with asymmetric surfaces - the first surface has a specific curvature radius to prevent light interference and improve measurement accuracy, while the second surface maintains a different curvature to accommodate sealing requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for accurate detection and measurement of trace analysis target gases by preventing moisture condensation on the window material, ensuring reliable absorbance analysis and reducing measurement errors.
Implementation Method 1
an absorption analyzer that analyzes an analysis target gas on the basis of absorbance
Implementation Method 2
a pressing body including a fixing surface fixed to the base flange and a tilted surface pressing the outer surface of the window material against the base flange side
Implementation Method 3
ensuring reliable absorbance analysis and reducing measurement errors
Data Source
AI summary
In order to provide an absorption analyzer capable of directly measuring an analysis target gas flowing into or produced in a vessel such as a chamber and preventing a measurement error due to moisture condensation, the absorption analyzer is adapted to include: a light emission module that is attached covering a first opening of the vessel into which the analysis target gas flows or in which the analysis target gas is produced and emits light into the vessel; and a light detection module that detects the light emitted from the light emission module and passing through the vessel. In addition, the light emission module is adapted to include: a base flange that is attached around the first opening on an outer surface of the vessel; a window material whose outer surface is tilted at a predetermined angle; a seal member; and a pressing body.