Deposition Mask Seating Using AC Electrostatic Chuck Alignment
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Solution Overview
Problem
Existing deposition apparatuses face challenges in easily seating a deposition mask on a substrate during the manufacturing of OLED display devices, which is crucial for forming light emitting layers.
Innovation Solution
A deposition apparatus comprising a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck, where the deposition mask includes a polymer mask with a conductive layer, and substrates are grounded with swapped AC power to generate electrostatic forces for precise mask seating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a deposition mask is used in existing deposition apparatuses, then organic materials can be deposited to form light emitting layers, but the mask seating process becomes difficult and complex
Solution Approach 1:
The patent replaces mechanical mask seating mechanisms with an electrostatic system. The electrostatic chuck generates electrostatic forces to hold and position the deposition mask automatically, eliminating complex mechanical adjustment mechanisms and making the mask seating process easier while maintaining precise deposition accuracy.
Solution Approach 2:
The patent changes the physical state and properties of the mask system by applying electrostatic fields. By controlling electrostatic parameters (voltage, charge distribution), the mask can be easily seated and positioned with high precision, transforming the seating process from a mechanical operation to an electrically controlled process.
2Measurement precision
If AC power is applied to the deposition mask with grounded substrate, then electrostatic forces are generated for precise mask seating, but energy consumption increases
Solution Approach 1:
The patent applies AC power periodically to the deposition mask rather than continuous DC power. This periodic application of electrostatic force achieves the necessary mask positioning and holding while reducing overall energy consumption compared to continuous power application, as the electrostatic chuck can maintain positioning during the zero-crossing periods of the AC cycle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise seating of the deposition mask on the substrate, ensuring accurate deposition of organic materials for light emitting layers, thereby improving the manufacturing process of OLED display devices.
Implementation Method 1
An electrostatic force is generated in the electrostatic chuck to dispose a substrate on a surface of the electrostatic chuck
Implementation Method 2
AC power is applied to the deposition mask to dispose the deposition mask to be close to the substrate
Data Source
AI summary
An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.