AC Signal Analysis System for Semiconductor Heat Source Position Identification
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Solution Overview
Problem
In measurement objects with multiple metals, applying a modulation current can cause heat transfer due to the Peltier effect, leading to inaccurate identification of the heat source position corresponding to a failure portion.
Innovation Solution
An analysis system and method that applies an alternating current (AC) signal to the measurement object, detects light from the object using an infrared camera or photodetector, and identifies the heat source position by analyzing the detection signal, with adjustments to the AC signal's amplitude, frequency, and phase to minimize heat transfer errors caused by the Peltier effect.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a modulation current is applied to a measurement object containing multiple types of metals, then heat generated from a heat source can be detected, but heat transfer occurs between the metals due to the Peltier effect, causing the detected heat source position to differ from the actual failure portion
Solution Approach 1:
The patent applies periodic AC signals at specific frequencies to the measurement object. By using periodic excitation and lock-in detection techniques, the system can distinguish between heat generated by the failure portion and heat transferred via the Peltier effect, thereby identifying the actual heat source position accurately despite the presence of multiple metal types
Solution Approach 2:
The patent changes the frequency parameter of the applied current signal to optimize measurement conditions. By adjusting the frequency of the AC signal and analyzing the phase and amplitude characteristics of the thermal response, the system can differentiate between direct heat generation and Peltier-induced heat transfer, resolving the position identification error
2Measurement precision
If an AC signal is applied to cancel the Peltier effect, then heat source position identification accuracy is improved, but the system complexity increases due to the need for signal adjustment and lock-in measurement techniques
Solution Approach 1:
The patent employs lock-in detection technology that uses feedback mechanisms to analyze the thermal response signal. By comparing the detected signal with the reference AC signal and adjusting the measurement parameters accordingly, the system can accurately extract the heat source position information while filtering out Peltier effect interference, managing the complexity through intelligent signal processing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Accurately identifies the heat source position corresponding to a failure portion by canceling the Peltier effect and improving measurement accuracy through lock-in measurement techniques and phase delay analysis.
Implementation Method 1
if a modulation current is applied to the measurement object, a transfer (absorption or emission) of heat occurs between the metals due to the Peltier effect
Implementation Method 2
since the AC signal is adjusted so that the amounts of current flowing through both sides are equal to a reference voltage of a semiconductor device SD, an influence of the Peltier effect is canceled
Implementation Method 3
a light detection unit that detects light from the measurement object due to said applied AC signal and outputs a detection signal
Data Source
Figure 1
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Figure 3(a)~3(b)
AI summary
A system and a method capable of identifying a heat source position corresponding to a failure portion are provided. An analysis system according to the present invention is an analysis system that identifies a heat source position inside a semiconductor device, and includes a tester that applies an AC signal to the semiconductor device, an infrared camera that detects light from the semiconductor device according to the AC signal and outputs a detection signal, and a data analysis unit that identifies the heat source position based on the detection signal.