Acceleration Sensor Offset Correction for Temperature Gradients

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Solution Overview

Problem

Existing acceleration sensors face challenges in maintaining offset stability due to radiometric forces caused by temperature gradients, which are not effectively compensated by current methods, especially in multi-axis sensors.

Innovation Solution

A sensor system and method that corrects the offset of acceleration sensors induced by temperature gradients by ascertaining temperature-dependent variables and properties, allowing for efficient compensation of parasitic TGO effects without requiring extensive additional technology or manufacturing changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If temperature gradient compensation methods are implemented using additional thermocouple elements and bond wires, then offset stability is improved, but device complexity and manufacturing complexity increase

Engineering Contradiction:
Improveoffset stabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The acceleration sensor itself serves as the temperature sensor by utilizing its own temperature-dependent characteristics (capacitance, resonant frequency, or offset) to detect temperature gradients and generate compensation signals, eliminating the need for separate thermocouple elements and bond wires

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The acceleration sensor performs dual functions: measuring acceleration and detecting temperature gradients. The same sensor structure and readout circuitry are used for both purposes, reducing device complexity while maintaining offset stability

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If temperature gradient compensation methods are implemented using additional thermocouple elements and bond wires, then offset stability is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveoffset stabilityVSAvoidmanufacturing precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The acceleration sensor itself serves as the temperature sensor by utilizing its own temperature-dependent characteristics (capacitance, resonant frequency, or offset) to detect temperature gradients and generate compensation signals, eliminating the need for separate thermocouple elements and bond wires

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The temperature sensing function is extracted from the acceleration sensor's measurement function rather than adding separate thermocouple elements, allowing the same structure to serve both purposes without increasing manufacturing precision requirements

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution effectively improves the offset stability of acceleration sensors by accurately correcting temperature gradient-induced offsets, applicable to both z-axis and lateral acceleration sensors, thereby enhancing the performance of inertial measurement units (IMUs).

Implementation Method 1

a vertical or lateral temperature gradient or also a combination thereof may form in the sensor module

Methodology Applied
Scientific EffectTemperature gradient: Temperature Gradient

Implementation Method 2

The effect is described in C. Nagel, T. Zoller, F. Ante, J. Classen, M. Putnik, and J. Mehner, 'Radiometric effects in MEMS accelerometers,' 2017 IEEE SENSORS

Methodology Applied
Scientific EffectRadiometric effect: Radiation Pressure

Data Source

PatentUS12270824B2Sensor system, method for operating a sensor system
Publication Date: 2025.04.08 ROBERT BOSCH GMBH
  • US12270824B2 patent drawing
  • US12270824B2 patent drawing
  • US12270824B2 patent drawing

AI summary

A sensor system including a chip arrangement, the chip arrangement including a sensor and an acceleration sensor, and the sensor system including a processor circuit. The processor circuit is configured in such a way that: one or multiple temperature-dependent variables and/or properties of the sensor are ascertained, and an offset of a signal of the acceleration sensor induced by a temperature gradient is corrected with the aid of the one or the multiple ascertained temperature-dependent variables and/or properties of the sensor.