Acceleration Sensor Protruding Beam for Sensitivity Adjustment
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Solution Overview
Problem
Conventional three-dimensional acceleration sensors manufactured by microfabrication face challenges in adjusting sensitivity and determining defectiveness due to the difficulty in aligning and modifying through holes on the top and bottom sides of the laminated board, requiring destructive testing and complex layout changes.
Innovation Solution
The introduction of protruding parts beneath the beam parts allows for adjustment of the deformable portion length without altering the beam length, enabling easy sensitivity adjustment and defect determination by inspecting the protruding parts, which are formed on the supporting and weight parts of the laminated board.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the length of the beam part is changed to adjust sensitivity, then the sensitivity of the acceleration sensor is adjusted, but the layout on the top side and bottom side of the laminated board must be changed, making it difficult to adjust sensitivity
Solution Approach 1:
The beam part is segmented into a deformable portion and a non-deformable portion by introducing protruding parts that contact the beam part. This segmentation allows the non-deformable portion to be adjusted in length independently to change sensitivity, while the overall beam layout remains unchanged, resolving the contradiction between sensitivity adjustment and layout complexity.
2Manufacturing precision
If through holes are aligned on the top side and bottom side of the laminated board, then manufacturing precision is improved, but it requires destructive testing using SEM or TEM, making defect determination difficult
Solution Approach 1:
The protruding parts serve a dual function: they define the deformable portion length for sensitivity adjustment and simultaneously serve as visual markers for alignment verification. By observing whether protruding parts are present and properly positioned on the board surface, manufacturers can verify through hole alignment and detect defects without destructive testing, resolving the contradiction between manufacturing precision and defect detection difficulty.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies sensitivity adjustment and defect inspection, enhancing the strength and reliability of the acceleration sensor while avoiding the need for destructive testing and complex layout changes.
Implementation Method 1
Piezoresistive elements are formed on portions of the first layer of the laminated board corresponding to the beam parts
Data Source
AI summary
A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that the protruding part supports the beam part. With such an arrangement, the adjustment of the sensitivity of the acceleration sensor can be easily performed, as well as the evaluation of the acceleration sensor.