Acetylene Delivery System Cooling and Purification
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Solution Overview
Problem
Acetylene handling and delivery in semiconductor manufacturing is challenging due to its thermodynamic instability, flammability, and the introduction of solvent vapors from storage cylinders, which contaminate the manufacturing process.
Innovation Solution
A system and process that cool the acetylene feed stream to a temperature range of 20° C. to −50° C. to reduce solvent vapor pressure and use a purifier to remove solvents like acetone or dimethylformamide, ensuring high-purity acetylene delivery to the point of use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If acetylene is stored in cylinders with porous material saturated with acetone or other solvents to prevent decomposition and flammability, then safety is improved, but solvent vapor contamination increases
Solution Approach 1:
The patent extracts and removes the harmful solvent vapors from the acetylene stream using a purifier system. The purifier selectively adsorbs solvent molecules while allowing acetylene to pass through, effectively separating the harmful component from the useful gas.
Solution Approach 2:
The patent introduces a purifier as an intermediary component between the acetylene cylinder and the semiconductor manufacturing process. This intermediary device captures solvent vapors before they can contaminate the manufacturing environment, while maintaining safe acetylene delivery.
2Manufacturing precision
If acetylene is delivered at high purity levels to semiconductor manufacturing, then manufacturing precision is improved, but handling complexity increases
Solution Approach 1:
The patent combines multiple functions into a single integrated delivery system that includes cooling, purification, and metering capabilities. This merging of functions achieves high purity delivery while managing complexity through system integration rather than separate components.
Solution Approach 2:
The patent changes the temperature parameter of the acetylene delivery system by implementing cooling to reduce solvent vapor pressure. This parameter change enables high purity acetylene delivery by thermodynamically reducing solvent volatility, simplifying the purification requirement.
3Object-generated harmful factors
If cooling is applied to reduce solvent vapor pressure, then solvent removal efficiency is improved, but energy consumption increases
Solution Approach 1:
The patent applies partial cooling rather than extreme refrigeration, cooling the acetylene just enough to reduce solvent vapor pressure to acceptable levels. This partial action achieves sufficient solvent suppression without the excessive energy consumption of deep freezing.
Solution Approach 2:
The patent applies cooling locally at the point of acetylene delivery rather than cooling the entire storage cylinder. This localized cooling approach reduces solvent vapor pressure where needed while minimizing overall energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides acetylene at 100 ppm or less solvent, reducing contamination and safety risks, increasing acetylene cylinder utilization, and minimizing the need for frequent refills and solvent handling, thereby lowering operational costs and ensuring uninterrupted semiconductor manufacturing processes.
Implementation Method 1
cool the acetylene feed stream to a temperature range of 20° C. to −50° C. to reduce solvent vapor pressure
Implementation Method 2
introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein
Data Source
AI summary
A system for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising a storage vessel that houses an acetylene feed steam comprising acetylene and solvent; a cooling system that maintains the storage vessel and provides the acetylene feed stream at a temperature ranging from 20° C. to −50° C.; and a purifier in fluid communication with the storage vessel wherein the acetylene feed stream is introduced into the purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.