Acetylene Fluid Supply Package Using Low Vapor Pressure Solvents

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Solution Overview

Problem

Traditional solvents used in acetylene storage and delivery systems, such as acetone, dimethylformamide (DMF), and N-methyl-2-pyrrolidone (NMP), pose challenges due to high vapor pressures leading to solvent carryover and reproductive toxicity, which contaminates acetylene and affects film deposition rates and uniformity in applications like carbon and carbon-containing film deposition.

Innovation Solution

The use of improved solvents like triethyl phosphate (TEP) with low vapor pressures and high Hansen solubility factors, which are non-toxic and do not contain boron, calcium, or nickel, to solubilize acetylene, minimizing solvent carryover and ensuring high purity acetylene delivery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If traditional solvents (acetone, DMF, NMP) are used to solubilize acetylene, then acetylene solubilizing capacity is achieved, but solvent carryover occurs due to high vapor pressure and toxicity contaminates the acetylene

Engineering Contradiction:
Improveacetylene solubilizing capacityVSAvoidsolvent carryover and toxicity
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The patent changes the physical and chemical parameters of the solvent by selecting compounds with specific vapor pressure ranges (0.1-100 torr at 20°C) and Hansen solubility factors (δh ≥ 5 MPa^0.5). This parameter optimization allows the solvent to maintain adequate acetylene solubilizing capacity while reducing vapor pressure to minimize carryover and selecting non-toxic compounds to eliminate contamination hazards.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite system consisting of porous filler media (providing structural support and surface area) combined with improved solvent compounds (providing acetylene solubilization). The porous filler acts as a matrix that holds the solvent while the solvent molecules interact with acetylene, creating a composite material system that achieves both solubilization and reduced harmful effects.

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If solvent amount is increased to improve acetylene solubilizing capacity, then more acetylene can be stored, but solvent carryover increases during delivery

Engineering Contradiction:
Improveacetylene storage capacityVSAvoidsolvent carryover during delivery
Core Design Contradiction:
Quantity of substanceVSLoss of substance

Solution Approach 1:

The patent optimizes the vapor pressure parameter of the solvent to a specific range (0.1-100 torr at 20°C) that balances two competing requirements: enough solvent presence to dissolve and store acetylene effectively, but low enough vapor pressure to prevent excessive solvent evaporation and carryover during acetylene delivery and dispensing operations.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If porous filler media is used to separate acetylene into small units, then thermal stability is improved, but solvent dispersion requirements increase

Engineering Contradiction:
Improveacetylene thermal stabilityVSAvoidsolvent dispersion complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent employs porous filler media with specific porosity characteristics (around 90% by volume) to provide a high-surface-area matrix that physically separates acetylene molecules and stabilizes them against decomposition. The porous structure allows solvent to disperse throughout the matrix while maintaining the thermal stability benefits of acetylene segmentation.

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The improved solvents maintain effective acetylene solubilizing capacity while reducing solvent carryover and toxicity, resulting in high-purity acetylene delivery and improved film deposition properties, eliminating the risks associated with traditional solvents.

Implementation Method 1

an improved solvent within the porous filler, the solvent solubilizing with acetylene absorbed within the improved solvent

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Implementation Method 2

The function of the porous filler media is to separate acetylene into small units in the pores that help to inhibit the decomposition of acetylene

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 3

The function of the solvent is to absorb large amounts of acetylene at relatively low pressures to enable high cylinder loading in low pressure cylinders

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS20220260212A1Acetylene fluid supply package, system comprising the same and method of fabricating semiconductor device using the same
Publication Date: 2022.08.18 PRAXAIR TECH INC
  • US20220260212A1 patent drawing
  • US20220260212A1 patent drawing
  • US20220260212A1 patent drawing

AI summary

A composition comprising acetylene fluid at least partially solubilized in an improved solvent is described. The improved solvents exhibit non-toxicity and are further characterized by low vapor pressures to minimize solvent carryover during delivery of the acetylene fluid, while retaining suitable acetylene solubilizing capacity.