Acoustic Wave Filter Isolation Regions for Reduced Capacitive Coupling

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Solution Overview

Problem

Acoustic wave filters in radio frequency systems face challenges with capacitive coupling between filters, leading to performance issues due to the high dielectric constant of piezoelectric substrates like lithium niobate and lithium tantalate, which limits isolation and increases costs and size when separate dies are used.

Innovation Solution

Creating an isolation region on the substrate with a lower dielectric constant by altering the crystalline structure using laser light, allowing filters to share a common die while reducing capacitive coupling, thus improving isolation and maintaining performance without increasing size or cost.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If filters are placed on separate dies to reduce capacitive coupling, then isolation between filters is improved, but device complexity and cost increase

Engineering Contradiction:
Improveisolation between filtersVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple filters onto a single substrate by introducing isolation regions that reduce capacitive coupling between adjacent filters. This merging approach maintains the isolation benefits of separate dies while eliminating the complexity and cost of multiple separate components, directly resolving the technical contradiction between isolation performance and device complexity.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If filters are placed on separate dies to reduce capacitive coupling, then isolation between filters is improved, but manufacturing cost increases

Engineering Contradiction:
Improveisolation between filtersVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent combines multiple filters onto a single substrate using isolation regions to reduce capacitive coupling. This approach maintains the isolation performance of separate dies while reducing manufacturing cost by eliminating the need for multiple separate dies, packaging operations, and inter-connect structures, directly addressing the cost contradiction.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If filters are placed on separate dies to reduce capacitive coupling, then isolation between filters is improved, but device size increases

Engineering Contradiction:
Improveisolation between filtersVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent merges multiple filters onto a single substrate with isolation regions, achieving compact integration that reduces the overall device footprint compared to separate dies while maintaining isolation performance through the low-dielectric-constant isolation regions.

Inventive Principle:
Principle #5Merging (Combining)

4Reliability

If isolation regions are introduced to reduce capacitive coupling, then isolation between filters is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveisolation between filtersVSAvoidmanufacturing precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent changes the dielectric parameter of the substrate by creating isolation regions with low dielectric constant material or disrupted crystalline structure. This parameter change reduces capacitive coupling between filters while using standard semiconductor fabrication techniques, balancing isolation improvement with manageable manufacturing precision requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances isolation between filters, reduces capacitive coupling, and allows for smaller, more cost-effective acoustic wave filter designs that meet stringent specifications, while maintaining mechanical integrity and ease of manufacturing.

Implementation Method 1

The isolation region can be formed by applying laser light to the substrate

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The isolation region can have a lower dielectric constant than other regions of the substrate

Methodology Applied
Scientific EffectDielectric heating: Dielectric Heating

Data Source

PatentUS11463069B2Acoustic wave filters with isolation
Publication Date: 2022.10.04 SKYWORKS SOLUTIONS INC
  • US11463069B2 patent drawing
  • US11463069B2 patent drawing
  • US11463069B2 patent drawing

AI summary

Embodiments of this disclosure relate to reducing coupling between acoustic wave resonators. An isolation region of a substrate can be located between acoustic wave resonators. The isolation region can reduce capacitive coupling through the substrate between the acoustic wave resonators. In certain embodiments, the isolation region can be located between acoustic wave resonators of different filters to thereby increase isolation between the filters.