Acoustic Micropump Phase Control for Directional Fluid Flow

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Solution Overview

Problem

Existing micropump devices face challenges such as low pumping flow rate, high input power consumption, energy inefficiency, and limited flexibility in fluid flow direction due to mechanical complexities and non-directional acoustic wave propagation.

Innovation Solution

An acoustic micropump device utilizing piezoelectric transducers organized into sets of at least three groups, actuated by phase-shifted electrical control signals to create a net fluid flow, enabling high pumping velocity and flexible flow direction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a silicon-based diaphragm piezoelectric micropump device is used, then high pumping flow rate is achieved, but the device requires complicated design and complex fabrication of inlet and outlet valves

Engineering Contradiction:
Improvepumping flow rateVSAvoiddesign and fabrication complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent removes the complex inlet and outlet valve mechanisms from the micropump design. Instead of using traditional mechanical valves, the invention employs acoustic radiation pressure and streaming effects to achieve directional fluid flow, thereby simplifying the overall device structure while maintaining high pumping flow rate capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces mechanical valve systems with an acoustic field-based control mechanism. By using piezoelectric transducers to generate acoustic waves and resulting streaming flows, the system achieves fluid direction control without mechanical moving parts, reducing design and fabrication complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If a silicon-based diaphragm piezoelectric micropump device is used, then high pumping flow rate is achieved, but very high input power is required

Engineering Contradiction:
Improvepumping flow rateVSAvoidinput power consumption
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The patent operates piezoelectric transducers at resonant frequencies to maximize acoustic wave generation efficiency. By tuning the operating parameters (frequency, amplitude) to match the resonant characteristics of the acoustic cavity and fluid system, the device achieves high pumping flow rates with reduced input power requirements compared to non-resonant operation

Inventive Principle:
Principle #35Parameter changes

3Reliability

If surface acoustic wave (SAW) micropump device is used, then no mechanical moving parts are required, but the acoustic wave propagates non-directionally resulting in energy inefficiency

Engineering Contradiction:
Improvemechanical failure resistanceVSAvoidacoustic energy efficiency
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent introduces asymmetry in the acoustic field distribution by using specific transducer geometries and positioning strategies. This creates asymmetric acoustic radiation pressure and streaming patterns that drive fluid flow in a preferred direction, converting the previously non-directional SAW propagation into a directionally controlled flow mechanism with improved energy efficiency

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent transitions from two-dimensional SAW propagation on a surface to three-dimensional acoustic cavity modes that confine and direct acoustic energy volumetrically. This dimensional transition enables directional control of acoustic streaming while maintaining the advantage of having no mechanical moving parts

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Reliability

If surface acoustic wave (SAW) micropump device is used, then no mechanical moving parts are required, but low pumping flow rate is achieved

Engineering Contradiction:
Improvemechanical failure resistanceVSAvoidpumping flow rate
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent employs periodic excitation of piezoelectric transducers at resonant frequencies to generate sustained acoustic waves. This periodic action creates steady acoustic streaming flows that maintain consistent pumping performance, achieving higher flow rates compared to non-resonant or aperiodic operation while preserving the mechanical reliability advantage

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent uses composite structures combining piezoelectric materials with acoustic cavity designs that enhance acoustic wave generation and streaming effects. This composite approach maximizes the conversion efficiency from electrical to acoustic energy, thereby achieving higher pumping flow rates without introducing mechanical moving parts

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves a high pumping flow rate of several hundreds of µL/min with low input power and flexible flow direction control, overcoming the limitations of existing technologies.

Implementation Method 1

the micropump device employs piezoelectric transducers, which are controlled in at least three groups

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

Acoustic streaming refers to a fluid flow, which is induced by the force arising from the presence of a gradient in the time-averaged acoustic momentum flux inside the fluid domain

Methodology Applied
Scientific EffectAcoustic streaming:

Data Source

PatentEP4656877A1An acoustic micropump device using piezoelectric transducers to create a directional fluid flow
Publication Date: 2025.12.03 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP4656877A1 patent drawingFigure 1(a)~1(b)
  • EP4656877A1 patent drawingFigure 2
  • EP4656877A1 patent drawingFigure 3

AI summary

The present disclosure relates to a micropump device for creating a net fluid flow along a flow direction. The device comprises a fluid channel and a plurality of piezoelectric transducers arranged adjacent to the fluid channel. The piezoelectric transducers are organized into a set of at least three groups, the groups being consecutively arranged along the flow direction, and each comprising at least one piezoelectric transducer. A controller of the device is configured to actuate the piezoelectric transducers using at least three periodic electrical control signals, each electrical control signal being associated with one group of the set. The controller is configured to consecutively delay the at least three electrical control signals to another, in accordance with the consecutively arranged groups of the set, to create the net flow of fluid along the flow direction.