Scanning Acoustic Microscope Surface Profile Internal Imaging
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Solution Overview
Problem
Conventional scanning acoustic microscopes are limited in their ability to simultaneously collect and display both surface and internal profiles of a sample, as well as time and frequency domain signal representations, which hinders comprehensive inspection of devices like IC packages.
Innovation Solution
A scanning acoustic microscope system capable of collecting and displaying surface profiles, internal acoustic images, and time/frequency domain signal representations, utilizing a transducer array and advanced data processing to provide comprehensive acoustic data without additional scanning time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional scanning acoustic microscope uses single-mode transducer and traditional gating process, then device complexity is reduced, but measurement precision and inspection completeness deteriorate due to inability to simultaneously display surface and internal profiles
Solution Approach 1:
The patent applies multi-functionality by enabling a single scanning acoustic microscope system to perform multiple inspection functions: surface profile measurement, internal defect detection, and acoustic imaging. This is achieved by processing different components of the acoustic signal (surface reflections vs. internal reflections) through separate processing paths that can be simultaneously activated, allowing one instrument to replace multiple specialized devices.
Solution Approach 2:
The patent segments the acoustic signal processing into distinct channels: a surface profile processing path that isolates surface reflections and an internal defect detection path that isolates internal reflections. This segmentation allows independent optimization of each processing path while maintaining overall system integration, resolving the contradiction between measurement precision and device complexity.
2Productivity
If scanning acoustic microscope collects both surface and internal acoustic data simultaneously, then inspection efficiency is improved, but data processing complexity increases
Solution Approach 1:
The patent segments the time-domain acoustic signal into distinct temporal windows corresponding to surface reflections and internal reflections. By separating these signals in the time domain before processing, the system can simultaneously collect both surface and internal data while managing processing complexity through structured separation of data streams.
Solution Approach 2:
The patent transforms the two-dimensional scanning process into a three-dimensional data structure by adding depth information through time-domain separation. This dimensional expansion allows simultaneous display of surface and internal profiles without proportionally increasing processing complexity, as the separation is achieved through temporal dimensionality rather than requiring multiple independent scanning processes.
3Loss of information
If traditional gating process is used to isolate pixel signals, then ease of operation is maintained, but loss of information occurs due to inability to simultaneously display multiple profile types
Solution Approach 1:
The patent segments the acoustic signal processing into parallel paths that simultaneously process surface and internal reflections. This segmentation allows both types of information to be collected and displayed at the same time without requiring sequential operations, thereby reducing information loss while maintaining ease of operation through parallel processing.
Solution Approach 2:
The patent adds a temporal dimension to the traditional spatial scanning process, enabling simultaneous display of surface and internal profiles by separating signals in the time domain. This dimensional approach allows complete acoustic information to be captured in a single scanning operation without complicating the user interface or operational procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simultaneous visualization of surface and internal features, improving defect detection and identification in devices by providing detailed topographical and impedance information, reducing the need for multiple instruments and enhancing inspection efficiency.
Implementation Method 1
a transducer which is driven by voltage pulses which may have amplitudes of, for example, 100 volts or more and are typically in the frequency range of tens of megahertz to 100 megahertz or higher. The pulsed acoustic beam penetrates the target
Implementation Method 2
A fraction of the energy passes through the target, and the remainder is absorbed, scattered, or reflected. Acoustic energy is almost totally reflected by an air gap. Thus acoustic microscopes have proven to be extremely useful in locating disbonds (air gaps) between internal layers of a device
Implementation Method 3
In accordance with the invention, there is provided a scanning acoustic microscope capable of collecting and displaying any profile image of a sample including a surface profile, an internal profile or any combination of the two
Data Source
AI summary
A scanning acoustic microscope, includes an ultrasonic transducer, a data storage memory, a display, a scanner assembly, and a controller. The controller is adapted to cause the motor to move the transducer along a path with respect to a sample, and cause the ultrasonic transducer to emit a pulse of acoustic energy towards the sample at each point in a plurality of points along the path. In addition, the controller is adapted to cause the ultrasonic transducer to receive a set of reflection signals that correspond to each of the pulses emitted therefrom. The sets of reflection signals are used to generate an image of a profile of the sample and an image representative of acoustic impedance features in the interior of the sample. The image of the profile of the sample shows a variation in height across a surface of the sample.