Acoustic Resonator Cavity Sizing for Mixed-Size Wave Devices
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Solution Overview
Problem
The manufacturing efficiency of acoustic wave devices is reduced when resonators of different sizes are used, as existing methods require identical hollow portions and through-holes for all resonators.
Innovation Solution
The acoustic wave device incorporates varying-sized hollow portions and through-holes, where the volume and opening area of the hollow portions and through-holes are proportionally adjusted based on the size of each resonator, allowing for improved manufacturing efficiency and space optimization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If identical hollow portions and through-holes are formed for all resonators, then manufacturing process simplicity is maintained, but manufacturing efficiency is reduced
Solution Approach 1:
The patent applies local quality by making the hollow portions and through-holes have different sizes according to the specific requirements of each resonator. Instead of using a uniform design for all resonators, the hollow portion volume and through-hole opening area are locally optimized to match each resonator's size, thereby improving manufacturing efficiency without sacrificing process simplicity
Solution Approach 2:
The patent changes the parameters of the hollow portions and through-holes to resolve the contradiction. Specifically, the volume of hollow portions and the total opening area of through-holes are adjusted as variables that correspond to resonator size. This parameter optimization enables more efficient manufacturing while maintaining the simplicity of the overall manufacturing process
2Volume of moving object
If larger hollow portions and through-holes are used, then space for acoustic wave propagation is improved, but device area increases
Solution Approach 1:
The patent applies local quality by providing different hollow portion volumes and through-hole opening areas for different resonators based on their specific size requirements. Smaller resonators are paired with smaller hollow portions and through-holes, while larger resonators receive larger hollow portions and through-holes. This localized optimization ensures adequate acoustic wave propagation space for each resonator without unnecessarily increasing the overall device area
Solution Approach 2:
The patent employs asymmetry by breaking the uniform design pattern and creating asymmetric relationships between resonator size and hollow portion/through-hole size. Each resonator-hollow portion-through-hole combination is asymmetrically optimized according to the resonator's specific dimensions, allowing efficient space utilization across the entire device
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the efficient production of acoustic wave devices with improved manufacturing efficiency and space savings by tailoring the hollow and through-hole dimensions to each resonator's size, enhancing the overall device performance.
Implementation Method 1
an acoustic wave device using plate waves propagating through a piezoelectric layer made of LiNbO3
Implementation Method 2
Lamb waves are excited. A reflector is disposed on each side of the IDT electrode. Accordingly, an acoustic wave resonator using plate waves is provided
Data Source
AI summary
An acoustic wave device includes a support, a piezoelectric layer, a first resonator including a first portion of the piezoelectric layer and a first functional electrode in the first portion of the piezoelectric layer, and a second resonator including a second portion of the piezoelectric layer and a second functional electrode in the second portion of the piezoelectric layer. A first hollow portion in the support overlaps the first resonator, and a second hollow portion in the support overlaps the second resonator. At least one first through-hole penetrates the piezoelectric layer and communicates with the first hollow portion, and at least one second through-hole penetrates the piezoelectric layer and communicates with the second hollow portion. A volume and a total opening area of the first hollow portion are larger than those of the second hollow portion.