Array Acoustic Tomography Parallel Scanning Without Waveform Overlap
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Solution Overview
Problem
Existing array-type scanning acoustic tomographs face limitations in achieving high-speed flaw detection and ultrasonic image display due to physical constraints in electronic scanning times for ultrasonic wave transmission and reception.
Innovation Solution
The array-type scanning acoustic tomograph employs a method where ultrasonic beams are emitted and received in parallel by dividing the scanning region into two groups, allowing for simultaneous scanning by different groups of vibrators, and processing the signals to generate ultrasonic images without waveform overlap.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single vibrator or sequential scanning method is used, then the device complexity is low, but the ultrasonic image display time is too long and cannot achieve high-speed flaw detection
Solution Approach 1:
The patent divides the ultrasonic beam irradiation region into two distinct regions (first region and second region) and assigns different vibrator groups to scan each region simultaneously. This segmentation allows parallel processing of different spatial zones, effectively doubling the scanning throughput and reducing overall display time while maintaining comprehensive coverage of the inspection area.
Solution Approach 2:
The patent implements continuous parallel scanning by having multiple vibrator groups operate simultaneously without idle time. While one vibrator group is scanning the first region, another group scans the second region at the same time, ensuring that the system continuously processes multiple areas without interruption, thereby maximizing productivity and minimizing total inspection time.
2Productivity
If parallel scanning with multiple vibrator groups is implemented, then the ultrasonic image display speed increases, but the device complexity and signal processing complexity increase
Solution Approach 1:
The patent segments both the physical scanning region and the control system into manageable parts. By dividing the irradiation region into first and second regions, and corresponding vibrator groups, the complex parallel scanning task is broken down into simpler, independent sub-tasks that can be controlled and processed separately, making the overall system more manageable despite the increased parallelism.
Solution Approach 2:
The patent pre-organizes the scanning sequence by predeterminedly setting the order in which vibrator groups scan different regions. This preliminary arrangement of scanning sequences allows the control system to manage multiple vibrator groups more efficiently, reducing real-time decision complexity and enabling smoother coordination of parallel operations.
3Loss of time
If parallel scanning is used to reduce scanning time, then waveform overlap may occur causing image quality degradation
Solution Approach 1:
The patent spatially segments the scanning regions into distinct first and second regions that are scanned by different vibrator groups in parallel. This spatial separation prevents waveform overlap by ensuring that ultrasonic beams from different vibrator groups target different areas simultaneously, maintaining image quality while achieving time reduction through parallel processing.
Solution Approach 2:
The patent predeterminedly arranges the scanning sequences and timing of different vibrator groups to avoid waveform interference. By pre-planning the scan paths and timing coordination, the system ensures that reflected waves from different regions are received and processed without overlap, preserving signal clarity and image quality throughout the accelerated scanning process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly speeds up the display of ultrasonic images by parallel scanning, reducing the overall scanning time and enhancing the efficiency of flaw detection in integrated semiconductor subjects.
Implementation Method 1
an ultrasonic vibrator 22 including a plurality of elements 22a continuously arranged in an array
Implementation Method 2
a signal processing unit 64 to process reception signals of the reflected ultrasonic waves received by the vibrator group
Data Source
AI summary
The array-type scanning acoustic tomograph includes a selection unit to select the elements constituting a vibrator group that connects vibrator drive signals and reception signals. The vibrator group is divided into a first group that emits ultrasonic beams to a former half of an ultrasonic beam irradiation region and a second group that emits ultrasonic beams to a latter half of the ultrasonic beam irradiation region. The selection unit is instructed to select the vibrator groups of the first group to emit ultrasonic beams, instructed to select the vibrator group of the second group to emit ultrasonic beams, then the selection unit is instructed to select the vibrator groups of the first group to receive reflected ultrasonic waves, and then instructed to select the vibrator group of the second group to receive reflected ultrasonic wave, and the same waveforms are displayed on a display unit without overlapping.


