Acoustic Wave Electrode Structure for Large-Cavity Resonance Stability
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Solution Overview
Problem
Increasing the size of acoustic wave devices to enhance performance leads to structural weaknesses due to enlarged cavities in the support substrate, which can compromise the device's stability and resonance characteristics.
Innovation Solution
The acoustic wave device incorporates a support substrate with a cavity, a piezoelectric film, and a functional electrode arranged in a thickness direction, where the support overlaps the intersection region of the electrodes, utilizing the thickness-shear mode to minimize structural weaknesses and maintain resonance quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the size of the acoustic wave device is increased to enhance performance, then the resonance characteristics are improved, but the structural weakness increases due to the enlarged cavity
Solution Approach 1:
The patent applies local quality by providing supports at specific locations within the cavity rather than uniformly across the entire structure. The supports are strategically positioned to provide localized reinforcement where needed, allowing the device to maintain enhanced resonance characteristics while compensating for structural weaknesses in specific regions of the enlarged cavity.
Solution Approach 2:
The patent segments the cavity by introducing multiple discrete supports that divide the large cavity into smaller effective regions. This segmentation approach allows the device to benefit from the larger overall size for improved resonance while the individual support elements provide localized structural reinforcement, effectively breaking down the structural weakness problem into manageable sections.
2Productivity
If the size of the cavity is increased, then the device performance is enhanced, but the structural stability deteriorates
Solution Approach 1:
The patent implements local quality by placing supports at specific strategic locations within the enlarged cavity rather than uniformly throughout. This allows the device to maintain enhanced performance from the larger cavity size while providing localized structural stability where the supports are positioned, preventing overall structural deterioration.
Solution Approach 2:
The patent addresses the stability issue by adding supports in the vertical dimension (thickness direction) within the cavity. This dimensional approach provides structural reinforcement without constraining the horizontal expansion of the cavity, allowing performance enhancement while maintaining stability through a different spatial dimension.
3Reliability
If the cavity size is enlarged, then the resonance characteristics are improved, but the structural weakness increases
Solution Approach 1:
The patent applies local quality by providing supports at specific locations within the cavity rather than uniformly across the entire structure. The supports are strategically positioned to provide localized reinforcement where needed, allowing the device to maintain enhanced resonance characteristics while compensating for structural weaknesses in specific regions of the enlarged cavity.
Solution Approach 2:
The patent segments the cavity by introducing multiple discrete supports that divide the large cavity into smaller effective regions. This segmentation approach allows the device to benefit from the larger overall size for improved resonance while the individual support elements provide localized structural reinforcement, effectively breaking down the structural weakness problem into manageable sections.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces structural weaknesses while maintaining or improving resonance characteristics, allowing for more robust and efficient operation of the acoustic wave device without significant degradation.
Implementation Method 1
the piezoelectric film, a functional electrode, and at least one support... The functional electrode includes electrodes arranged in a direction crossing a thickness direction of the piezoelectric film... utilizing the thickness-shear mode
Data Source
AI summary
An acoustic wave device includes a support substrate, a piezoelectric film, a functional electrode, and a support. The support substrate includes a cavity. The piezoelectric film is provided on the support substrate to cover the cavity. The functional electrode is provided on the piezoelectric film to overlap the cavity when viewed in a plan view. The support is in the cavity of the support substrate to support the piezoelectric film. The functional electrode includes electrodes arranged in a direction crossing the thickness direction of the piezoelectric film. The electrodes include a first electrode and a second electrode. The first electrode and the second electrode oppose each other in a direction crossing the thickness direction of the piezoelectric film and are connected to different potentials. Adjacent ones of the electrodes overlap each other in a direction orthogonal to a longitudinal direction of the first electrode.