Acoustic Wave Package Venting Through Piezoelectric Layer Holes
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Solution Overview
Problem
Acoustic wave devices with piezoelectric layers are prone to damage due to air pressure differences between internal and external spaces, leading to performance degradation and reduced reliability.
Innovation Solution
The design incorporates a through-hole in the piezoelectric layer that communicates with both internal and external spaces, ensuring equal air pressure and reducing the risk of damage by allowing gas exchange through a path that connects these spaces, thereby maintaining consistent pressure and preventing damage from pressure differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a space is created in the acoustic wave device, then the device structure is improved for acoustic wave propagation, but the piezoelectric layer may be damaged due to air pressure difference between the space and outside
Solution Approach 1:
The piezoelectric layer is segmented by forming a through-hole that divides it into regions, allowing pressure equalization between the internal space and external environment without compromising the overall structural integrity of the device
Solution Approach 2:
The through-hole acts as an intermediary pathway that mediates the pressure difference between the internal space and external environment, allowing gas exchange to equalize pressure and prevent damage to the piezoelectric layer
2Volume of moving object
If the piezoelectric layer is made thinner to reduce device size, then the device compactness is improved, but the piezoelectric layer becomes more susceptible to damage from pressure differences
Solution Approach 1:
A through-hole is formed in the piezoelectric layer during manufacturing to establish a pressure equalization pathway before the device is subjected to pressure differences during operation, preventing damage in advance
Solution Approach 2:
A portion of the piezoelectric layer is extracted to form a through-hole, creating an opening that allows pressure equalization while maintaining the functional integrity of the remaining piezoelectric structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces or prevents damage to the piezoelectric layer, enhancing the stability and reliability of the acoustic wave device by maintaining equal air pressure across internal and external spaces, thus improving performance and longevity.
Implementation Method 1
the first space, the second space, and the outside of the package have the same air pressure
Data Source
AI summary
An acoustic wave device includes an acoustic wave element including a support including a support substrate having a thickness in a first direction, a piezoelectric layer laminated on the support portion and including a first main surface and a second main surface opposite to the first main surface in the first direction, and a functional electrode on at least one of the first main surface and the second main surface of the piezoelectric layer, and a package to house the acoustic wave element. The support portion includes a first space on a piezoelectric layer side at a position where the first space at least partially overlaps the functional electrode in a plan view in the first direction, the package includes a second space outside the first space, and the piezoelectric layer includes a through-hole communicating with the first space and the second space.