Interdigitated Acoustic Wave Electrode Layout for Wider Pass-Bands

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Solution Overview

Problem

Existing acoustic wave devices utilizing bulk waves in thickness shear mode face challenges in achieving desirable filter characteristics, such as increased electrostatic capacitance and pass-band width, without increasing the size of the filter device.

Innovation Solution

The acoustic wave device incorporates a piezoelectric film with a specific configuration of comb-shaped electrodes and a third electrode connected to a reference potential, arranged in a sequence that defines one period, allowing for a reduced size and increased pass-band width.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stress or pressure

If the electrostatic capacitance of an acoustic wave resonator is increased by enlarging the resonator, then the electrostatic capacitance is improved, but the size of the ladder filter is increased

Engineering Contradiction:
Improveelectrostatic capacitanceVSAvoidsize of ladder filter
Core Design Contradiction:
Stress or pressureVSArea of stationary object

Solution Approach 1:

The electrode structure is segmented into multiple electrode fingers (first electrode fingers and second electrode fingers) arranged in an interdigitated pattern. This segmentation increases the effective capacitance area without proportionally increasing the overall device footprint, as the electrodes are stacked in a compact interdigitated arrangement rather than spread out linearly

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a one-dimensional linear arrangement of electrodes to a two-dimensional interdigitated pattern. The electrode fingers are arranged both in the direction of wave propagation and perpendicular to it, creating a compact structure that increases capacitance through vertical stacking and lateral interdigitating, thereby improving capacitance without linearly increasing the filter size

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If a simple configuration with input and output electrodes is used, then the device complexity is reduced, but the pass-band width is insufficient

Engineering Contradiction:
Improveelectrode configurationVSAvoidpass-band width
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

The electrode structure is divided into multiple segments (first electrode fingers and second electrode fingers) arranged in an interdigitated pattern. This segmentation creates multiple resonance paths and coupling zones, which broaden the pass-band width while maintaining a relatively simple overall configuration that can be fabricated using standard processes

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the electrode structure are given different functions: the first electrode fingers and second electrode fingers are arranged to create specific coupling zones with varying capacitance distributions. This local differentiation of electrode properties enables broadband performance through distributed resonance modes, achieving increased pass-band width without requiring a completely complex multi-resonator structure

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables a filter device to have a reduced size and an increased pass-band width, effectively addressing the limitations of existing technologies while maintaining desirable filter waveforms.

Implementation Method 1

a piezoelectric layer is disposed on a support. Electrodes defining an electrode pair are disposed on the piezoelectric layer... By application of alternating-current voltage between the electrodes, a bulk wave in thickness shear mode is excited

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20250183875A1Acoustic wave device
Publication Date: 2025.06.05 MURATA MFG CO LTD
  • US20250183875A1 patent drawing
  • US20250183875A1 patent drawing
  • US20250183875A1 patent drawing

AI summary

An acoustic wave device includes a piezoelectric layer, first and second comb-shaped electrodes, and a third electrode. The first comb-shaped electrode is on the piezoelectric layer, connected to an input potential, and including a first busbar, and first electrode fingers. The second comb-shaped electrode is on the piezoelectric layer, connected to an output potential, and including a second busbar, and second electrode fingers. The third electrode is connected to a potential different from the first and second comb-shaped electrodes, and includes third electrode fingers, and a connection electrode. The connection electrode interconnects adjacent third electrode fingers. The first electrode finger, the third electrode finger, the second electrode finger, and the third electrode finger are arranged in this order. A ratio d/p is greater than or equal to about 0.05.