Acousto-Optic Beam Shaping for Microsecond Profile Switching
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Solution Overview
Problem
Current semiconductor manufacturing processes face inefficiencies in changing laser beam shapes during micromachining, leading to increased throughput time and limited beam shape options due to the need for optical component adjustments and specific setups.
Innovation Solution
A system incorporating an acousto-optical deflector (AOD) and acoustic signal generators to rapidly switch between Gaussian and modified laser beam profiles, such as top hat or multi-pole profiles, by applying periodic and freeform acoustic signals, allowing for quick changes in beam shape without moving optics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If optical elements are moved to change beam shape, then beam shape can be changed, but throughput time increases
Solution Approach 1:
The patent replaces the mechanical system of moving optical elements with an acousto-optical deflector (AOD) that uses acoustic waves to dynamically control beam shape. The AOD uses sound waves to create refractive index variations in a crystal, enabling rapid beam profile changes without any mechanical movement, thus resolving the contradiction between beam shape adaptability and throughput time
Solution Approach 2:
The patent implements dynamic beam shape control by applying different acoustic frequencies and amplitudes to the AOD in real-time. This allows the beam profile to be dynamically adjusted between Gaussian, top-hat, and multi-pole shapes during the fabrication process, enabling rapid adaptation without mechanical reconfiguration and maintaining high throughput
2Adaptability or versatility
If multiple beam shape switches are required, then different features can be processed, but fabrication time more than doubles
Solution Approach 1:
The patent replaces mechanical optical switching with acousto-optical control, allowing multiple beam shape transitions to occur in microseconds rather than seconds or minutes. The AOD can switch between Gaussian, top-hat, and multi-pole profiles by simply changing the acoustic signal, eliminating the time penalty associated with mechanical reconfiguration for each feature type
Solution Approach 2:
The patent pre-configures multiple beam shapes by programming different acoustic signals into the AOD control system. These beam profiles are prepared in advance and can be instantly recalled and applied as needed during fabrication, eliminating setup time and allowing rapid switching between different feature processing requirements
3Adaptability or versatility
If system optics are limited by size and movability, then beam shape range is constrained, but system complexity is reduced
Solution Approach 1:
The patent implements a universal beam shaping solution where a single AOD device can generate multiple beam profiles (Gaussian, top-hat, multi-pole) that would traditionally require different optical components. This multi-functional approach expands the beam shape range while actually reducing overall system complexity by consolidating what would otherwise require multiple specialized optical elements and their associated mounting and alignment mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces throughput time and enhances flexibility in producing desired beam shapes, enabling more efficient micromachining processes by changing beam shapes in microseconds between laser pulses.
Implementation Method 1
an acousto-optical deflector (AOD) may be positioned in a path of the laser beam... apply the second acoustic signal to the AOD to adjust the Gaussian profile of the deflected laser beam to a modified profile
Data Source
AI summary
A micromachining system includes a laser generator, an acousto-optical deflector (AOD), and at least one signal generator. The laser generator is configured to generate a laser beam, and the at least one AOD is positioned in a path of the laser beam. The at least one acoustic signal generator is configured to generate at least two acoustic signals, including a first acoustic signal having a periodic waveform and a second acoustic signal having a freeform waveform. The at least one acoustic signal generator is further configured to apply the first acoustic signal to the AOD to output a deflected laser beam having a Gaussian profile, and apply the second acoustic signal to the AOD to adjust the Gaussian profile of the deflected laser beam to a modified profile.