Acousto-Optic Substrate Illumination With Etendue Expansion

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Solution Overview

Problem

Existing optical inspection systems for semiconductor wafers face challenges in achieving high resolution, high contrast imaging, and high throughput while maintaining energy efficiency, due to limitations in numerical aperture and field of view.

Innovation Solution

The use of acousto-optic devices (AODs) with etendue expanding optical modules, including Dammann gratings, to convert collimated input beams into collimated output beams that cover a wider angular range, allowing for efficient illumination and scanning of substrate surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a traveling lens acousto-optic device illuminates the entire active region to generate multiple traveling lenses, then the field of view and coverage area are increased, but the energy usage efficiency is reduced

Engineering Contradiction:
Improveilluminated surface areaVSAvoidenergy usage efficiency
Core Design Contradiction:
Area of stationary objectVSUse of energy by moving object

Solution Approach 1:

The patent divides the single large illuminated active region into multiple smaller illuminated regions, each corresponding to a specific traveling lens. Only the portions of the active region needed for each lens are illuminated, rather than illuminating the entire active region. This segmentation approach maintains the ability to generate multiple traveling lenses for wide coverage while reducing the total illuminated area, thereby improving energy usage efficiency.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If the illuminated surface area is increased to improve field of view, then the throughput is increased, but the overall etendue is reduced

Engineering Contradiction:
Improveilluminated surface areaVSAvoidthroughput
Core Design Contradiction:
Area of stationary objectVSProductivity

Solution Approach 1:

The patent employs etendue expanding optical modules that utilize optical transformations in additional dimensions (such as angular distribution and spatial mapping) to increase the effective etendue. By using Dammann gratings and other optical elements that manipulate light in multiple dimensional spaces, the system achieves higher throughput and larger effective field of view without simply increasing the physical illuminated surface area, thereby resolving the contradiction between area and productivity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If higher numerical aperture optics are used to achieve high resolution imaging, then the imaging quality is improved, but the system complexity is increased

Engineering Contradiction:
Improveimaging resolutionVSAvoidoptical system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex high numerical aperture optical systems with acousto-optic devices that use acoustic fields to control and focus light. Instead of relying on complex mechanical optical arrangements with high NA lenses, the system uses acoustic waves to dynamically focus and steer beams, achieving high resolution imaging with a simpler optical configuration. This substitution of acoustic control for mechanical-optical complexity resolves the contradiction between resolution and device complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases etendue, enabling higher throughput and better energy efficiency in substrate inspection systems, while maintaining high resolution and contrast.

Implementation Method 1

A traveling lens acousto-optic device has an active region. An input beam illuminates the entire active region and a RF input signal is applied to the active region to selectively generate plural traveling lenses in the active region.

Methodology Applied
Scientific EffectAcousto-optic effect: Acousto-optic Effect

Implementation Method 2

The use of acousto-optic devices (AODs) with etendue expanding optical modules, including Dammann gratings, to convert collimated input beams into collimated output beams that cover a wider angular range

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS12393093B2Method for illuminating a substrate using multiple acousto optical devices
Publication Date: 2025.08.19 APPL MATERIALS ISRAEL LTD
  • US12393093B2 patent drawing
  • US12393093B2 patent drawing
  • US12393093B2 patent drawing

AI summary

A method and a system for illuminating a substrate, the system may include an acousto-optic device (AOD); and an etendue expanding optical module. The AOD may include a surface having an illuminated region; wherein the illuminated region is configured to receive a collimated input beam while being fed with a control signal that causes the illuminated region to output illuminated region output beams that are collimated and exhibit deflection angles that scan, during a scan period, a deflection angular range. The etendue expanding optical module is configured to convert the illuminated region output beams to collimated output beams that impinge on an output aperture; wherein a collimated output beam has a width that exceeds a width of an illuminated region output beam; and wherein the etendue expanding optical module comprises a Dammann grating that is configured to output diffraction patterns, each diffraction pattern comprises diffraction orders that cover a continuous angular range.