Acousto-optics Deflector and Polygon Mirror for Laser Beam Steering
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Solution Overview
Problem
Current laser drilling systems for integrated circuits face limitations in throughput due to the speed of mechanical mirror movement in galvo systems, which restricts the increase in galvo frequency, and inefficiencies in laser energy utilization due to the need for projection masks in laser projection patterning.
Innovation Solution
The use of an acousto-optics deflector and mirror system that steers laser beams non-mechanically, allowing for increased beam position accuracy and efficiency by deflecting and rotating the laser beam using acoustic signals and a polygon mirror, eliminating the need for masks in patterning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If galvo frequency is increased to improve throughput, then productivity increases, but mechanical mirror movement speed limitations prevent further increase
Solution Approach 1:
The patent replaces the mechanical galvo mirror system with an acousto-optic deflector that uses acoustic waves to modulate and steer the laser beam. This substitution eliminates mechanical moving parts, allowing for much higher modulation frequencies and beam steering speeds, thereby resolving the throughput limitation imposed by mechanical mirror movement speed.
2Manufacturing precision
If projection masks are used in laser projection patterning to achieve patterning, then manufacturing precision is improved, but laser energy utilization efficiency deteriorates due to blocked energy
Solution Approach 1:
The patent replaces physical projection masks with an acousto-optic deflector that steers the laser beam electronically to desired positions. This eliminates the need for masks that block laser energy, allowing all laser energy to be utilized effectively while maintaining patterning precision through precise acoustic control of beam direction.
3Measurement precision
If mechanical mirror systems are used for beam steering, then beam position control is achieved, but acceleration and deceleration time limits the speed of operation
Solution Approach 1:
The patent replaces mechanical mirror acceleration and deceleration with acoustic wave modulation in the acousto-optic deflector. The acoustic waves can be turned on and off instantaneously, allowing the laser beam to be steered to new positions without mechanical inertia delays, thereby eliminating acceleration and deceleration time while maintaining position accuracy through precise acoustic frequency control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances laser drilling processing speed, improves alignment accuracy, and increases laser energy utilization efficiency by enabling faster and more precise beam steering without mechanical acceleration or deceleration, resulting in higher throughput and better pattern generation.
Implementation Method 1
an acousto-optics module to deflect a laser beam in a first scanning direction of the laser beam on an integrated circuit (IC) substrate when the IC substrate is in a path of the laser beam
Implementation Method 2
a polygon mirror having multiple surfaces corresponding with multiple sides of the polygon, the at least one surface to receive the laser beam from the acousto-optics module, the polygon mirror to rotate to steer the laser beam in a second scanning direction substantially perpendicular to the first scanning direction
Data Source
AI summary
Embodiments of the present disclosure are directed towards an acousto-optics deflector and mirror for laser beam steering and associated techniques and configurations. In one embodiment, a laser system may include an acousto-optics module to deflect a laser beam in a first scanning direction of the laser beam on an integrated circuit (IC) substrate when the IC substrate is in a path of the laser beam and a mirror having at least one surface to receive the laser beam from the acousto-optics module, the mirror to move to control position of the laser beam in a second scanning direction, wherein the second scanning direction is substantially perpendicular to the first scanning direction. Other embodiments may be described and/or claimed.