Active Bearing Mounting for Fast Replacement in Precision Motion Systems
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Solution Overview
Problem
Existing active anti-vibration systems for precision motion systems, such as semiconductor processing equipment, face challenges in replacing active bearings due to complex disassembly requirements, which can lead to downtime and maintenance difficulties.
Innovation Solution
The active anti-vibration system incorporates a design with through-holes in the mounting base and captive screw retainers in the active bearings, allowing for easy disassembly and replacement of active bearings by unscrewing fixation elements and using a rod to engage with captive screw retainers, facilitating the removal and installation of active bearings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If active bearings are secured using traditional fastening methods, then the mounting base is firmly supported, but the disassembly process becomes complex and time-consuming
Solution Approach 1:
The fixation system is segmented into modular components: the mounting base with through-holes, fixation elements (screws), and captive screw retainers integrated into the active bearing assembly. This segmentation allows the active bearing to be securely fastened while enabling straightforward disassembly by simply removing the fixation elements through the accessible through-holes, resolving the contradiction between firm support and ease of repair.
2Object-affected harmful factors
If the active bearing is tightly integrated into the mounting base, then vibration isolation is effective, but replacement requires disassembling the granite base from the metallic frame
Solution Approach 1:
The fixation elements and captive screw retainers are extracted as separate, accessible components from the integrated active bearing assembly. The through-holes in the mounting base provide direct access to the fixation elements, allowing them to be removed without disassembling the granite base from the metallic frame. This enables the active bearing to be replaced while maintaining effective vibration isolation during operation, resolving the contradiction between isolation effectiveness and replacement complexity.
3Device complexity
If fixation elements are concealed within the active bearing structure, then the appearance is cleaner, but access for removal is difficult
Solution Approach 1:
The captive screw retainers act as intermediaries between the concealed fixation elements and the external environment. These retainers are integrated into the active bearing structure but provide accessible openings through which fixation elements can be easily inserted and removed. This intermediary structure maintains the clean, integrated appearance while ensuring easy accessibility for maintenance operations, resolving the contradiction between structural integration and maintenance accessibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables quick and efficient replacement of active bearings, reducing maintenance time and minimizing disruptions to precision motion systems, thereby ensuring continuous operation with high accuracy.
Implementation Method 1
The active bearings support the granite base upwardly using a mechanical spring or an air spring, thereby passively isolating the base from the floor vibrations.
Data Source
AI summary
An active anti-vibration system includes a mounting base having an upper side onto which a motion system is mountable and a lower side, a supporting frame resting on the floor, and active bearings mounted into an active bearings compartment defined by the lower side of the mounting base and an upper side of the supporting frame. Each active bearing includes actuators for imparting counteracting forces to compensate for reactions forces generated by the motion system, when mounted onto the mounting base and operating, to avoid unwanted movements of the mounting base and dampen any residual movements. Each active bearing further includes an upper panel mounted against the lower side of the mounting base, and a lower panel mounted against the upper side of the supporting frame. The mounting base includes through-holes extending from the upper side to the lower side of the mounting base, and a first set of fixation elements mounted inside respective through-holes to secure the active bearing upper panel to the lower side of the mounting base. The active bearings include a second set of fixation elements to secure the active bearing lower panel to the upper side of the supporting frame.