Active Bearing Isolation for Positioning Device Ground Vibration

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Solution Overview

Problem

Existing vibration isolation methods for positioning devices, such as coordinate measuring machines, face challenges in achieving reliable and adjustable isolation from ground vibrations while minimizing weight and ensuring high positioning accuracy, particularly at low frequencies.

Innovation Solution

The proposed apparatus employs a base plate with active bearing elements that include actuators and sensors to detect and control foundation movement-dependent quantities, allowing for adjustable vibration isolation by setting the natural frequency and damping behavior of the system, thereby reducing vibration transfer from the foundation to the positioning device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high mass base plate is used for vibration isolation, then vibration isolation performance is improved, but weight of the apparatus increases

Engineering Contradiction:
Improvevibration isolation performanceVSAvoidweight of base plate
Core Design Contradiction:
ReliabilityVSWeight of stationary object

Solution Approach 1:

The patent replaces the traditional passive mechanical vibration isolation system (relying on high mass base plate and passive dampers) with an active control system using actuators and sensors. The active bearing elements use controlled forces to counteract vibrations, substituting mechanical mass-based isolation with active mechanical intervention.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the parameters of the bearing elements from fixed passive properties to actively controllable parameters. By adjusting the control forces applied by actuators, the system can dynamically modify its vibration isolation characteristics without changing the physical mass of the base plate.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If passive spring-mass-damper elements are used, then device complexity is reduced, but adjustability of vibration isolation is limited

Engineering Contradiction:
Improveadjustability of vibration isolationVSAvoidcomplexity of bearing elements
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces dynamic control capabilities to the bearing elements by incorporating actuators that can adjust their characteristics in real-time. This transforms static passive elements into dynamic active elements, enabling adaptability to different vibration conditions while managing complexity through systematic control architecture.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements feedback control by using sensors to detect vibrations and feed this information to the control system, which then adjusts the actuator forces accordingly. This closed-loop feedback mechanism provides the necessary adjustability while organizing the system complexity into a manageable control structure.

Inventive Principle:
Principle #23Feedback

3Reliability

If active components are used for bearing base plate, then vibration isolation at low frequencies is improved, but device complexity increases

Engineering Contradiction:
Improvevibration isolation at low frequenciesVSAvoidcomplexity of bearing elements
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces passive mechanical vibration isolation with active control mechanisms that use sensors and actuators to detect and counteract low-frequency vibrations. This substitution enables effective low-frequency isolation that cannot be achieved with passive mechanical elements alone.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent enables dynamic adjustment of bearing element parameters through active control, allowing the system to optimize its response to low-frequency vibrations by changing control forces in real-time, thereby achieving frequency-specific isolation performance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reliable vibration isolation and compensation, reducing the weight of the base plate and positioning device, while improving positioning accuracy by minimizing unwanted movements caused by ground vibrations and inherent device movements.

Implementation Method 1

The positioning device can be isolated from vibrations of the ground by means of active bearing elements

Methodology Applied
Scientific EffectVibration isolation: Vibration

Implementation Method 2

a bearing element may include a damping element which is not regulated or controlled and a spring element which is not regulated or controlled. The effect of these elements together with the base plate forms the aforementioned spring-mass-damper element

Methodology Applied
Scientific EffectSpring-mass-damper principle: Spring

Implementation Method 3

a damping element which is not regulated or controlled

Methodology Applied
Scientific EffectDamping: Damping

Data Source

PatentUS11371647B2Method and apparatus for isolating a vibration of a positioning device
Publication Date: 2022.06.28 CARL ZEISS INDUSTRIELLE MESSTECHNIKE GMBH
  • US11371647B2 patent drawing
  • US11371647B2 patent drawing
  • US11371647B2 patent drawing

AI summary

A method and an apparatus for isolating a vibration of a positioning device are provided. The apparatus includes a base plate for the positioning device, at least one active bearing element for bearing the base plate on/at a foundation and at least one evaluation and control device. The apparatus includes at least one means for determining a foundation movement-dependent quantity, wherein the active bearing element is controllable by the at least one control and evaluation device on the basis of the foundation movement-dependent quantity.