Active Bearing Mounting for Replaceable Precision Vibration Isolation
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Solution Overview
Problem
Existing active anti-vibration systems for precision motion systems, such as semiconductor processing equipment, face challenges in easily replacing active bearings when they fail, due to complex disassembly requirements.
Innovation Solution
The active anti-vibration system incorporates a mounting base with threaded through-holes and captive screw retainers with magnets, allowing for easy disassembly and replacement of active bearings by unscrewing screws from the mounting base and supporting frame.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If active bearings are securely fastened to the mounting base and supporting frame, then the stability and reliability of the anti-vibration system is improved, but the complexity of disassembly and replacement increases
Solution Approach 1:
The active bearing is divided into separable components (upper panel with first fixation elements, lower panel with second fixation elements) that can be independently fastened to the mounting base and supporting frame. This segmentation allows the bearing to be securely mounted during operation while enabling easy disassembly and replacement when needed, resolving the contradiction between stability and ease of repair.
2Stability of the object's composition
If the granite base is permanently fixed to the metallic frame, then the structural stability is improved, but the ability to replace active bearings is worsened
Solution Approach 1:
The fixation system transitions from a permanent fixed state during operation to a easily disassemblable state during maintenance. The fixation elements (screws, bolts, or quick-release mechanisms) allow the system to dynamically change between a stable mounted state and a easily replaceable state, resolving the contradiction between structural stability and replaceability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables straightforward replacement of active bearings, reducing downtime and maintenance complexity while maintaining high precision and accuracy for the precision motion systems.
Implementation Method 1
The magnet is arranged to hold the screw when said screw is removed from the corresponding threaded hole of the upper side of the supporting frame during the disassembly of the corresponding active bearing for its replacement.
Data Source
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AI summary
The present invention relates to an active anti-vibration system (10) comprising a mounting base (12) having an upper side (12a) onto which a motion system can be mounted and a lower side (12b), a supporting frame (18) resting on the floor, and active bearings (30) mounted into an active bearings compartment (26) defined by the lower side (12b) of the mounting base (12) and an upper side (19) of the supporting frame (18). Each active bearing (30) comprises actuators for imparting counteracting forces to compensate for reactions forces generated by the motion system, when mounted onto the mounting base (12) and operating, to avoid unwanted movements of the mounting base (12) and dampen any residual movements. Each active bearing (32) further comprises an upper panel (32) mounted against the lower side (12a) of the mounting base (12), and a lower panel (36) mounted against the upper side (19) of the supporting frame (18). The mounting base (12) comprises through-holes (13) extending from the upper side (12a) to the lower side (12b) of the mounting base (12), and a first set of fixation elements (15) mounted inside respective through-holes (18) to secure the active bearing upper panel (32) to the lower side (12b) of the mounting base (12). The active bearings (30) comprise a second set of fixation elements (48) to secure the active bearing lower panel (36) to the upper side (19) of the supporting frame (18).