Active Bearing Vibration Isolation for Positioning Accuracy
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Solution Overview
Problem
Existing vibration isolation methods for positioning devices, such as coordinate measuring machines, face challenges in achieving reliable and adjustable isolation from ground vibrations while minimizing weight and ensuring high positioning accuracy, particularly at low frequencies.
Innovation Solution
The proposed apparatus employs a base plate with active bearing elements that include actuators and sensors to detect and control foundation movement-dependent quantities, allowing for adjustable vibration isolation by setting the natural frequency and damping behavior of the system, thereby reducing vibration transfer from the foundation to the positioning device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high mass base plate is used for vibration isolation, then vibration isolation performance is improved, but device weight increases
Solution Approach 1:
The patent replaces the traditional passive mechanical vibration isolation system (relying on high mass base plates) with an active control system using actuators and sensors. The active bearing elements use controlled forces to counteract vibrations, substituting mechanical mass-based isolation with dynamic active control, thereby achieving vibration isolation without requiring heavy base plates.
Solution Approach 2:
The patent changes the fundamental parameter of vibration isolation from static mass-based isolation to dynamic active control. By using actuators that can adjust their output forces in real-time based on sensor feedback, the system achieves adaptable vibration isolation performance without being constrained by the mass of the base plate.
2Device complexity
If passive spring-mass-damper elements are used, then device complexity is reduced, but adjustability and reliability of vibration isolation deteriorate
Solution Approach 1:
The patent transforms static passive bearing elements into dynamic active bearing elements. The actuators enable the bearing elements to adapt their characteristics in real-time, allowing the vibration isolation system to respond dynamically to changing vibration conditions and be adjusted for different frequency ranges and isolation requirements.
Solution Approach 2:
The patent implements feedback control by using sensors to detect vibrations and feeding this information back to the actuators, which then adjust their output accordingly. This closed-loop control system provides reliable and adjustable vibration isolation performance, overcoming the limitations of passive elements that cannot adapt to changing conditions.
3Reliability
If active components are used for vibration isolation, then adjustability and isolation performance are improved, but device complexity increases
Solution Approach 1:
The patent designs active bearing elements that combine multiple functions: they provide mechanical support, active vibration compensation, and adjustable isolation characteristics. By integrating actuators and sensors directly into the bearing elements, the system achieves multi-functionality without requiring separate dedicated components for each function, thereby limiting the increase in overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables reliable vibration isolation and compensation, reducing the weight of the base plate and positioning device, while improving positioning accuracy by minimizing unwanted movements caused by ground vibrations and inherent device movements.
Implementation Method 1
The active bearing element includes an actuator, in particular a piezo actuator
Implementation Method 2
The active bearing element includes an actuator, in particular a piezo actuator
Data Source
AI summary
A method and an apparatus for isolating a vibration of a positioning device are provided. The apparatus includes a base plate for the positioning device, at least one active bearing element for bearing the base plate on/at a foundation and at least one evaluation and control device. The apparatus includes at least one means for determining a foundation movement-dependent quantity, wherein the active bearing element is controllable by the at least one control and evaluation device on the basis of the foundation movement-dependent quantity.