Active Cable Holder for Vibration Isolation in Lithography
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Solution Overview
Problem
Conventional cable connections in lithographic apparatuses fail to adequately isolate vibrations from the base frame to the metro-frame, leading to increased noise levels and reduced accuracy in the projection process due to decreased flexibility and increased stiffness of the cable bundle, which is exacerbated by the growing number of cables and increasing performance requirements.
Innovation Solution
A cable connection system featuring a cable bundle holder that is actively controlled by a sensor and actuator system to maintain a consistent position along the cable length, reducing the transfer of vibrations from the base frame to the metro-frame by dynamically adjusting the cable bundle's position relative to the metro-frame.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the cable bundle is arranged in a wave-shape or twist to absorb vibrations, then vibration isolation is improved, but the flexibility of the cable bundle decreases and vibrations are passed on more easily
Solution Approach 1:
The cable bundle holder is made movable relative to the metro-frame through a control system with actuator and sensor. The holder can dynamically adjust its position to maintain optimal cable tension and flexibility, transforming the static cable arrangement into a dynamic adaptive system that responds to vibration conditions in real-time
Solution Approach 2:
The cable bundle holder acts as an intermediary element between the cable bundle and the metro-frame. By positioning the holder at specific locations along the cable length, the system creates a controlled interface that manages vibration transmission while maintaining cable flexibility and connection integrity
2Adaptability or versatility
If more cables are guided from the base-frame to the metro-frame, then the functionality and performance of the lithographic apparatus is improved, but the flexibility of the cable bundle decreases and vibrations are transferred more easily
Solution Approach 1:
The cable bundle is divided into multiple independent cable elements that can be individually managed. The cable bundle holder can selectively position and tension specific cable segments, allowing the system to maintain vibration isolation while accommodating multiple cables for enhanced functionality
Solution Approach 2:
The control system dynamically adjusts the tension, position, and configuration parameters of the cable bundle based on real-time vibration measurements. By changing these parameters adaptively, the system maintains effective vibration isolation regardless of the number or configuration of cables connected
3Strength
If the stiffness of the wave-shaped cable bundle is increased to match the vibration isolating air-mounts, then structural stability is improved, but base frame vibrations excite the metro-frame creating larger noise levels and lens vibrations
Solution Approach 1:
A sensor system continuously monitors the position and vibration characteristics of the cable bundle holder and metro-frame. This feedback information is fed to the control system, which adjusts the holder position and cable tension in real-time to prevent resonance and vibration excitation while maintaining structural stability
Solution Approach 2:
The system transitions from a static rigid cable arrangement to a dynamic adaptive system that can adjust its stiffness characteristics in real-time. The cable bundle holder can modify cable tension and positioning to optimize vibration isolation while preventing excitation of the metro-frame, adapting the overall system stiffness as needed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This active cable connection significantly reduces the transmission of vibrations and movements from the base frame to the metro-frame, enhancing vibration isolation and maintaining the accuracy of the projection process, even with increased performance demands and cable counts.
Implementation Method 1
A cable connection, a control system for a cable connection and a method to decrease the passing on of vibrations from a first object to a second object via a cable connection
Data Source
AI summary
A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length. One end of the cable bundle is fixed to the first object and another end of the bundle is fixed to the second object. A cable bundle holder configured to hold the cable bundle at a certain location along the length of the cable bundle, and a control system configured to control the position of the cable bundle holder with respect to the second object are presented. A control system for cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are presented.