Active Carbonate Semiconductor Compound for Substrate Modification

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Solution Overview

Problem

Current methods for forming patterns on substrates for fine devices, such as semiconductor elements and organic EL displays, are limited in their ability to simultaneously modify the substrate and introduce semiconductor characteristics, often requiring multiple steps and materials.

Innovation Solution

A compound with an active carbonate structure and semiconductor characteristics is used to chemically modify the substrate, allowing for the simultaneous modification of an aminated surface and introduction of semiconductor groups, thereby omitting the need for a wiring formation base film and enabling the formation of an organic semiconductor base film.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple separate materials and steps are used to modify substrate and introduce semiconductor characteristics, then the modification can be thorough, but the process complexity increases and productivity decreases

Engineering Contradiction:
Improvesubstrate modification completenessVSAvoidpattern formation efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent combines multiple functional groups into a single compound molecule: an active carbonate group for reacting with amino groups on the substrate, and a semiconductor characteristic group (such as tetracene, rubrene, or pentacene) for providing semiconductor properties. This merging allows one compound to perform multiple functions that previously required separate materials and steps, thereby simplifying the process and improving productivity while maintaining thorough substrate modification

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The compound designed in the patent serves multiple purposes simultaneously: it acts as a coupling agent to bind to the aminated substrate surface, introduces semiconductor characteristics to enable charge transport, and forms a base film for subsequent wiring formation. This multi-functionality eliminates the need for separate wiring formation base films and reduces the number of process steps

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If a wiring formation base film is used separately, then the semiconductor characteristics can be introduced, but the number of process steps increases

Engineering Contradiction:
Improvesemiconductor characteristic introductionVSAvoidprocess steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the function of the wiring formation base film with the substrate modification step by incorporating the semiconductor characteristic group directly into the coupling agent molecule. This eliminates the need for a separate wiring formation base film step, as the compound itself provides the necessary semiconductor properties for subsequent wiring formation processes

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The coupling agent compound serves universally as both the substrate modifier and the semiconductor characteristic introducer, replacing the need for separate wiring formation base film materials. This multi-functional approach reduces device complexity by consolidating multiple functions into a single material and process step

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient and direct introduction of semiconductor characteristics onto substrates, simplifying the pattern formation process and facilitating the creation of organic semiconductor base films, which enhances the production of fine devices by integrating semiconductor properties into the substrate.

Implementation Method 1

chemically modifying the aminated surface using the compound according to the first embodiment of the present invention

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Data Source

PatentUS11767327B2Compound, pattern forming substrate, coupling agent, and pattern formation method
Publication Date: 2023.09.26 NIKON CORP
  • US11767327B2 patent drawing
  • US11767327B2 patent drawing
  • US11767327B2 patent drawing

AI summary

What is provided is a compound, a pattern forming substrate, a coupling agent, and a pattern formation method. The compound is represented by Formula (1).[in the formula, X01 represents a group exhibiting semiconductor characteristics and Y represents a divalent linking group]