Electrically Active Chip Seal Ring for MOSFET Contamination Control
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Solution Overview
Problem
Conventional MOSFET devices are prone to performance degradation due to contamination that can migrate to the conducting channel during fabrication and operation, affecting their reliability and efficiency.
Innovation Solution
The integration of an electrically active chip seal ring surrounding the gate and source regions, which is electrically coupled to the gate regions and acts to trap contaminants, preventing them from reaching the conduction channel and thereby enhancing the device's reliability and performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional MOSFET fabrication processes are used, then manufacturing simplicity is maintained, but contamination migrates to the conducting channel causing performance degradation
Solution Approach 1:
The chip seal ring is formed during the fabrication process before the device is completed, creating a protective barrier in advance that prevents contamination from reaching the conducting channel during subsequent operations and usage
Solution Approach 2:
The electrically active chip seal ring acts as an intermediary structure between the external environment and the conducting channel, intercepting contaminants and preventing them from migrating to the sensitive conduction region
2Reliability
If an electrically active chip seal ring is added, then contamination is trapped and device reliability is enhanced, but device complexity increases
Solution Approach 1:
The chip seal ring serves multiple functions simultaneously: it acts as a physical barrier to trap contaminants, provides electrical connection through coupling to gate regions, and maintains device operation by preventing contamination of the conducting channel
Solution Approach 2:
The chip seal ring is integrated with the existing gate bus structure, merging the contamination protection function with the existing electrical connection system rather than adding completely separate components
Data Source
AI summary
A transistor and method of manufacturing an electrically active chip seal ring surrounding the gate, gate insulator and source structure of the active core area of the transistor. The chip seal ring can be electrically coupled to the gate to seal the active core area from intrusions of contaminants, impurities, defects and or the like.