Active Edge Gripper Wireless Actuation for Substrate Transport
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Solution Overview
Problem
Conventional semiconductor substrate transport apparatuses with passive end effectors have limited operating speeds due to reliance on static friction, and those with active edge grip end effectors face contamination issues from cables and slip rings, restricting mobility and increasing costs.
Innovation Solution
A substrate transport apparatus with a movable arm assembly and an end effector featuring a chuck with a movable edge gripper actuated by a motion sensor, utilizing wireless communication for actuation, eliminating the need for cables and reducing contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If passive end effectors are used, then the apparatus can operate in a controlled atmosphere, but the operating speed is limited by the coefficient of static friction
Solution Approach 1:
The end effector transitions from a static passive grip to a dynamic active grip system. The gripper can actively clamp the substrate edge when high-speed transport is required, and release to a passive state when friction suffices, dynamically adapting the grip mechanism to operational needs.
Solution Approach 2:
The system changes the grip parameter from relying solely on friction coefficient to applying active clamping force. By controlling the grip force parameter, the system can achieve higher speeds while maintaining substrate security, overcoming the friction limitation.
2Speed
If active edge grip end effectors with cables are used, then higher transport speeds are achieved, but cable flexing generates contamination particles
Solution Approach 1:
The cable and slip ring components are completely removed from the system. The arm assembly is equipped with a wireless power transmission system and wireless communication system, extracting the harmful cable elements that generate contamination particles while maintaining active grip capability.
Solution Approach 2:
The mechanical cable-driven actuation system is replaced with a wireless actuation system. The wireless power and communication systems enable active edge grip actuation without any physical cable connections, eliminating the source of contamination particles.
3Device complexity
If slip rings are used at articulated joints, then cable run length is reduced, but particulate contamination is generated at contact surfaces
Solution Approach 1:
The slip ring component is completely removed from the articulated joints. The wireless power and communication systems eliminate the need for any rotating electrical contacts, extracting the contamination-generating slip rings while maintaining functionality.
4Adaptability or versatility
If cables extend through the apparatus to the end effector, then power and control are provided, but the apparatus is tied to a fixed power supply and has limited mobility
Solution Approach 1:
The cable-based power and control system is replaced with wireless systems. The wireless power transmission system provides power without physical connections, and the wireless communication system provides control signals, enabling the arm assembly to move freely without being tethered to a fixed power supply.
Data Source
AI summary
A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.