Active Filtration System for Cleanroom Contamination Control
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Solution Overview
Problem
Current HEPA and ULPA filtration systems in cleanroom environments are inadequate for removing airborne molecular contamination (AMC) and biological particles, leading to potential contamination risks and inefficiencies in semiconductor and pharmaceutical manufacturing due to high pressure drops, incomplete removal of viruses, and biofilm formation in filters.
Innovation Solution
An active filtration system that combines electrostatic filtering with processes for inactivating or degrading molecular and biological contaminants, using a corona discharge to transform contaminants into less reactive or inert products, reducing particulate levels while minimizing energy consumption and pressure drop.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If HEPA or ULPA filtration systems are used to remove particulate contaminants, then particulate contamination levels are reduced, but pressure drop increases substantially
Solution Approach 1:
The patent replaces the mechanical filtration system (HEPA/ULPA filters) with an electrostatic precipitation system that uses electrical fields to charge and collect particles. This substitution eliminates the need for dense physical filter media, thereby maintaining effective particulate removal while substantially reducing pressure drop across the filtration system
Solution Approach 2:
The patent changes the operating parameters by introducing electrostatic charging mechanisms that allow particle collection at lower pressure drops. By controlling electrical field strength and charge distribution, the system achieves comparable particulate removal efficiency to HEPA/ULPA filters without requiring the same degree of mechanical resistance to airflow
2Manufacturing precision
If HEPA or ULPA filtration systems are used to remove particulate contaminants, then particulate contamination levels are reduced, but airborne molecular contamination (AMC) removal is insufficient
Solution Approach 1:
The patent merges electrostatic precipitation technology with chemical filtration capabilities into a single integrated system. The electrostatic section handles particulate removal while the chemical filtration section addresses AMC, allowing both functions to work synergistically rather than requiring separate systems
Solution Approach 2:
The patent creates a multi-functional filtration system that simultaneously addresses both particulate contamination and airborne molecular contamination. The system performs multiple functions (electrostatic charging, particle collection, chemical adsorption) within a unified architecture, eliminating the need for separate HEPA/ULPA and chemical filter systems
3Reliability
If chemical filtration is added to remove airborne molecular contamination (AMC), then AMC levels are reduced, but pressure drop and cost increase
Solution Approach 1:
The patent replaces traditional mechanical chemical filtration media with electrostatically charged collection mechanisms. By using electrical fields to attract and collect molecular contaminants rather than relying solely on physical adsorption through dense chemical filter media, the system achieves effective AMC removal with lower pressure drop
4Reliability
If conventional filtration and sterilization processes are used, then aseptic conditions are achieved, but aeration time required after sterilization is prolonged
Solution Approach 1:
The patent replaces conventional thermal or chemical sterilization processes with electrostatic precipitation and filtration. This substitution eliminates the need for prolonged aeration periods required to dissipate residual sterilants, as the electrostatic system physically removes contaminants without leaving harmful residues that require extended ventilation time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The active filtration system effectively reduces AMC and biological contaminants, decreases aeration time after sterilization, and maintains sterile conditions, enhancing productivity and reducing contamination risks by efficiently decomposing gas-phase sterilants and molecular contaminants.
Implementation Method 1
using a corona discharge to transform contaminants into less reactive or inert products
Implementation Method 2
combines electrostatic filtering with processes for inactivating or degrading molecular and biological contaminants
Data Source
AI summary
This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.