Active Compensation Element for Fluid Pressure Vibration Damping
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Solution Overview
Problem
Existing solutions for damping vibrations in fluid systems, particularly with incompressible liquids, are often complex, large, and require specific adaptation to each piping system, making them unsuitable for applications requiring high precision and flexibility, such as the semiconductor industry, where they can cause damage due to pressure fluctuations.
Innovation Solution
A compact compensation element with a hollow body and actuator that adjusts the internal volume to actively dampen vibrations, suitable for a wide range of fluids, including ultra-pure water and corrosive media, by connecting to the fluid conduit in a force-fitting manner and using piezoelectric actuators for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If expansion vessels are used to compensate for pressure changes, then pressure stability is improved, but device complexity and volume increase
Solution Approach 1:
The patent replaces passive mechanical expansion vessels with an active control system comprising a pump, flow meters, and a control unit. The pump actively adjusts fluid flow to compensate for pressure changes, replacing the passive volume expansion mechanism with an active feedback control system that uses sensors and actuators to maintain pressure stability.
Solution Approach 2:
The system implements feedback control by continuously monitoring pressure changes with sensors and adjusting pump operation accordingly. The control unit receives pressure data, calculates required compensation, and adjusts the pump flow rate in real-time to maintain stable pressure, creating a closed-loop control system that actively responds to pressure variations.
2Stability of the object's composition
If large volume expansion vessels are used for high precision applications, then pressure stability is improved, but device size and installation space increase
Solution Approach 1:
The patent replaces large passive expansion vessels with a compact active control system. Instead of using large volumes of compressible fluid to absorb pressure changes, the system uses a small pump with flow control capabilities to actively maintain pressure, dramatically reducing the required device volume while achieving superior pressure stability.
Solution Approach 2:
The system changes the approach from passive volume-based pressure compensation to active flow-rate-based compensation. By dynamically adjusting the pump flow rate parameter in response to pressure changes, the system achieves effective pressure stabilization with minimal device volume, as the compensation is achieved through control parameter adjustment rather than physical volume expansion.
3Object-affected harmful factors
If Helmholtz resonators are used to dampen pressure fluctuations, then vibration damping is improved, but device complexity and frequency-specific tuning requirements increase
Solution Approach 1:
The patent uses feedback control with pressure sensors and a control unit to actively dampen vibrations across all frequencies. Unlike passive Helmholtz resonators that are tuned to specific frequencies, the active system continuously monitors pressure fluctuations and adjusts pump operation in real-time to counteract vibrations of any frequency, providing broad-spectrum vibration damping without frequency-specific tuning.
Solution Approach 2:
The system transitions from static, frequency-fixed passive damping to dynamic, adaptive active damping. The pump and control system can dynamically adjust their operation in real-time to counteract vibrations at any frequency, making the damping mechanism adaptable and effective across a wide frequency spectrum rather than being limited to a single resonant frequency.
4Ease of operation
If passive expansion vessels are used, then ease of operation is improved, but adaptability to different frequency ranges and piping systems decreases
Solution Approach 1:
The patent implements a dynamic control system that can adapt to different operating conditions, frequency ranges, and piping systems. The control unit receives input from pressure sensors and automatically adjusts pump operation to optimize performance for the specific application, providing both ease of operation through automation and adaptability through real-time parameter adjustment.
Solution Approach 2:
The active control system with pump and control unit serves multiple functions: pressure stabilization, vibration damping across all frequencies, and adaptation to different piping systems and applications. This multi-functional system replaces multiple specialized passive components with a single versatile active system that can be configured for various applications through software control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively reduces pressure fluctuations and vibrations by up to 99.5% across a broad frequency range, ensuring stable pressure conditions and minimizing the risk of damage to sensitive equipment, while being adaptable and easy to install.
Implementation Method 1
using piezoelectric actuators for precise control
Data Source
AI summary
The disclosure relates to a compensation element for actively damping vibrations of a medium, in particular a fluid. The compensation element comprises a hollow body having an internal volume, with a compensation volume being formed in the internal volume, with the hollow body also having at least two openings which connect the compensation volume to a fluid conduit that is used to supply and discharge the medium, wherein the compensation element is separable from the fluid conduit in a non-destructive manner, and at least one actuator which can increase or decrease the compensation volume during operation.