Active Gas Generator Vacuum Feeding Space for Breakdown Isolation

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Solution Overview

Problem

Conventional active gas generators face challenges in enhancing the insulating properties of the feeding space without reducing the amount of active gas generated, as measures to prevent electrical breakdown in the feeding space, such as increasing pressure or thickening electrode dielectric films, lead to contradictory effects on discharge power and gas production.

Innovation Solution

The active gas generator employs a gas separation structure that separates the feeding space from the active gas generating space using a vacuum pump to maintain high insulating properties in the feeding space, while minimizing the need for thicker electrode dielectric films by reducing pressure differences, and incorporates a high voltage feeder with a cooling function to prevent thermal damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the pressure in the feeding space is increased to prevent electrical breakdown, then the insulating properties of the feeding space are improved, but the differential pressure between the feeding space and the active gas generating space increases, which may damage the electrode dielectric film

Engineering Contradiction:

Improveinsulating properties of feeding spaceVSAvoiddifferential pressure on electrode dielectric film

Core Design Contradiction:

ReliabilityVSStress or pressure

Solution Approach 1:

The patent changes the pressure parameter of the feeding space from atmospheric pressure to vacuum pressure. This reversal of pressure conditions prevents electrical breakdown while reducing the differential pressure acting on the electrode dielectric film, as the discharge space operates at lower pressure (e.g., atmospheric or sub-atmospheric) while the feeding space is maintained at vacuum pressure through a vacuum pump.

Inventive Principle:

Principle #35Parameter changes

2Productivity

If the discharge application power is increased to generate more active gas, then the productivity of active gas is improved, but the electrical breakdown in the feeding space consumes more discharge application voltage, reducing the discharge power available for active gas generation

Engineering Contradiction:

Improveamount of active gas generatedVSAvoiddischarge application voltage consumed by electrical breakdown

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The patent creates a vacuum environment in the feeding space, which acts as an inert environment free from atmospheric gases that would otherwise undergo electrical breakdown. By removing the gas molecules from the feeding space, electrical breakdown is prevented, and all discharge application voltage can be effectively utilized for active gas generation in the discharge space, eliminating the energy loss to unnecessary breakdown events.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

3Strength

If the high-voltage-electrode dielectric film is thickened to prevent damage from differential pressure, then the strength of the dielectric film is improved, but the discharge voltage available for the discharge space decreases, reducing the amount of active gas generated

Engineering Contradiction:

Improvestrength of high-voltage-electrode dielectric filmVSAvoiddischarge voltage applied to discharge space

Core Design Contradiction:

StrengthVSPower

Solution Approach 1:

The patent changes the pressure parameter of the feeding space to vacuum, which fundamentally alters the differential pressure conditions. This allows the use of thinner dielectric films because the pressure differential is reduced or reversed (depending on discharge space pressure), thereby preserving more discharge voltage for active gas generation while maintaining sufficient mechanical strength through the modified pressure environment rather than increased film thickness.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach maintains high discharge voltage and efficient active gas production by ensuring the feeding space operates under vacuum, thereby enhancing insulating properties without reducing the amount of active gas generated, and prevents thermal damage to electrode dielectric films.

Implementation Method 1

a vacuum pump disposed outside the housing and setting the feeding space under vacuum

Methodology Applied

Scientific EffectVacuum: Vacuum

Implementation Method 2

an active gas generator that generates active gas through a parallel-plate dielectric barrier discharge

Methodology Applied

Scientific EffectDielectric barrier discharge: Dielectric

Data Source

PatentUS12463014B2Active gas generator

Publication Date: 2025.11.04 TMEIC CORP

AI summary

A housing in an active gas generator according to the present disclosure includes a peripheral stepped region formed along an outer periphery of a central bottom region, the peripheral stepped region being higher in formed height than the central bottom region. A high-voltage-electrode dielectric film on the peripheral stepped region forms a gas separation structure for separating a gas stream into a feeding space and an active gas generating space including a discharge space. A vacuum pump disposed outside the housing sets the feeding space under vacuum.