Active-Matrix Chuck Heating Layout for High-Zone Temperature Control
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Solution Overview
Problem
Current electrostatic chucks with fewer than 10 heating zones are insufficient for meeting the stringent requirements of uniformity and critical dimension in semiconductor manufacturing, and increasing the number of zones leads to a complex structural design challenge due to the need for numerous power supply and return lines.
Innovation Solution
A multi-zone active-matrix temperature control system is introduced, which includes a temperature control matrix with N*M temperature control modules, semiconductor switches, and a gate driver. This system allows for precise temperature control of each zone while significantly reducing the number of lead-out lines by using a common power return line and power supply lines that selectively power columns or rows of temperature control modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the number of heating zones is increased to meet uniformity and critical dimension requirements, then temperature control precision is improved, but the number of power supply lines and power return lines increases significantly
Solution Approach 1:
The patent merges all power return lines into a single common power return line that serves all heating zones. This consolidation reduces the number of separate power return lines from N (where N is the number of zones) to just one, significantly simplifying the overall wiring structure while maintaining the ability to independently control each heating zone through individual power supply lines
Solution Approach 2:
The patent segments the power supply system by providing individual power supply lines for each heating zone while consolidating the power return path. This segmentation allows independent control of each zone's heating power while the common power return line collects all return currents, achieving both precise zone control and reduced wiring complexity
2Ease of operation
If traditional design method is used with one power supply line and one power return line per heating zone, then each zone can be independently controlled, but the structural design becomes extremely complex for chucks with more than 100 zones
Solution Approach 1:
The patent merges all power return lines into a single common power return line that serves all heating zones. This consolidation reduces the number of separate power return lines from N (where N is the number of zones) to just one, significantly simplifying the overall wiring structure while maintaining the ability to independently control each heating zone through individual power supply lines
Solution Approach 2:
The common power return line serves a universal function by collecting return currents from all heating zones simultaneously. This single line performs the power return function for every zone, eliminating the need for dedicated power return lines for each zone and greatly simplifying the structural design
3Manufacturing precision
If more than 100 power supply lines and power return lines are arranged in a 300 mm or 450 mm diameter electrostatic chuck, then each zone can be controlled, but it becomes rather hard or even impossible to arrange these lines structurally
Solution Approach 1:
The patent merges all power return lines into a single common power return line that serves all heating zones. This consolidation reduces the number of separate power return lines from N (where N is the number of zones) to just one, significantly simplifying the overall wiring structure while maintaining the ability to independently control each heating zone through individual power supply lines
Solution Approach 2:
The patent reorganizes the wiring architecture by separating the power supply function (individual lines for each zone) from the power return function (single common line). This dimensional separation in the wiring topology allows efficient space utilization within the electrostatic chuck structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves precise temperature control for each zone of the electrostatic chuck, reduces the complexity of lead-out lines, and simplifies RF filtering, enabling more flexible and accurate control of temperature zones without electrical interference.
Implementation Method 1
a temperature control unit (321) for temperature controlling by being heated up by electrical power
Data Source
AI summary
Method for multi-zone temperature control system having temperature control matrix and gate driver; N*M temperature control modules form N-row M-column matrix, power supply line, and power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate being connected with the power supply line, and the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line at same row or same column are serially connected, and connected with the power supply line.