Active Pixel Sensor Readout for Co-Registered Electron Beam Imaging
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Solution Overview
Problem
Conventional charged particle detection systems require separate detectors for unidimensional and multidimensional data acquisition, leading to time lags, registration issues, and increased complexity, which affects image quality and acquisition speed.
Innovation Solution
A single active pixel control sensor with dual readout circuits is used to simultaneously generate unidimensional and multidimensional data signals, allowing for co-registered and contemporaneous data collection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate detectors are used for unidimensional and multidimensional data acquisition, then data collection can be performed with dedicated specialized sensors, but time lags and registration issues occur between the two data types
Solution Approach 1:
The patent combines unidimensional and multidimensional detection capabilities into a single detector system. The detector includes a sensor layer with pixels that generate both electron and hole signals, which are then routed through separate readout circuits to produce both data types simultaneously from the same detection event, eliminating time lags and registration issues between separate detectors
Solution Approach 2:
The single detector system performs multiple functions by generating both unidimensional data (through electron readout) and multidimensional data (through hole readout) from the same charged particle detection event. This multi-functional approach allows one detector to replace what would traditionally require two separate specialized detectors
2Reliability
If separate detectors are used for unidimensional and multidimensional data acquisition, then each detector can be optimized for its specific function, but system complexity and maintenance requirements increase
Solution Approach 1:
The patent merges the functionality of multiple detectors into a single integrated detector system. The sensor layer uses pixels that generate both electron and hole signals upon charged particle impact, and the readout circuitry is designed to process both signal types simultaneously, reducing the number of separate components while maintaining data reliability
Solution Approach 2:
While combining functions in one detector, the patent segments the readout process into separate circuits for electrons and holes. This segmentation allows each readout circuit to be optimized for its specific signal type while maintaining integration within a single detector system, balancing complexity management with functional optimization
3Device complexity
If a single detector is used to generate both unidimensional and multidimensional data signals, then system complexity is reduced and maintenance costs are lowered, but the detector must handle multiple data types simultaneously
Solution Approach 1:
The single detector achieves multi-functionality by utilizing the electron-hole pair generation mechanism to produce both unidimensional and multidimensional data signals. The readout circuitry is designed with separate processing paths for electrons and holes, enabling the detector to handle multiple data types simultaneously while maintaining a unified, less complex physical structure
Solution Approach 2:
The patent adds a dimensional aspect to data processing by separating electron and hole readout paths. This dimensional separation in the signal processing architecture allows the single detector to handle multiple data types (unidimensional from electrons, multidimensional from holes) simultaneously without increasing physical complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances image quality, reduces acquisition time, simplifies system architecture, and lowers maintenance costs by integrating both data types into a single detector system.
Implementation Method 1
Each pixel in the plurality of pixels produces at least an electron and a hole upon being struck by a charged particle
Data Source
AI summary
Systems and methods taught herein utilize a single detector to provide both unidimensional data (e.g., for direct topographical imaging) and multidimensional data (e.g., for crystallographic data) for a sample that is interrogated with a charged particle beam. In some examples, unidimensional data can include signal intensity due to backscattered electrons received across the entire detector surface while multidimensional data can include signal intensity due to backscattered electrons as a function of pixel position. By obtaining unidimensional data and multidimensional data from a single detector, the unidimensional data and multidimensional data can be obtained at a same location, at a same time, or both at the same location and same time.