Active Probe Card Signal Amplification for High-Speed Testing

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Solution Overview

Problem

Current probe cards suffer from reduced testing bandwidth and accuracy during high-speed and RF testing due to parasitic inductance and signal degradation, especially in high-frequency circuits and 3D ICs, which limits the ability to obtain accurate results from semiconductor devices with low power operations.

Innovation Solution

An active probe card with an amplification circuit integrated on a printed circuit board, coupled to probe needles, amplifies input and output signals to enhance the driving capability and reduce noise interference, thereby improving testing bandwidth and accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If probe needles and PCB traces are used for high-speed testing, then the testing interface is established, but signal degradation occurs due to parasitic inductance and long trace length

Engineering Contradiction:
Improvesignal qualityVSAvoidparasitic inductance and trace length
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

An active probe card is introduced as an intermediary device between the tester and the device under test. The active probe card includes amplification circuits that actively compensate for signal degradation caused by parasitic inductance and long trace lengths, thereby maintaining signal quality without requiring changes to the existing probe needle and PCB structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the electrical parameters of the testing interface by incorporating active amplification circuits. These circuits adjust signal amplitude and impedance characteristics to counteract the harmful effects of parasitic inductance and trace length, transforming the passive signal transmission path into an actively managed signal path.

Inventive Principle:
Principle #35Parameter changes

2Use of energy by moving object

If low power operations are used in semiconductor devices, then energy efficiency is improved, but driving capability decreases causing signal jitter and noise

Engineering Contradiction:
Improveenergy efficiencyVSAvoidsignal accuracy
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The active probe card serves as a mediator that compensates for the weak driving capability of low-power semiconductor devices. The amplification circuits detect and amplify the微弱 signals from the device under test, removing jitter and noise to restore signal accuracy while allowing the device to operate at low power levels.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The amplification circuits perform preliminary anti-action by pre-compensating for signal degradation and noise before the signals are fully corrupted. This proactive signal restoration ensures that even though the device operates with low driving capability, the final measured signal maintains high accuracy.

Inventive Principle:
Principle #9Preliminary anti-action

3Productivity

If conventional probe cards are used for high-speed testing, then the testing setup is simple, but testing bandwidth is limited due to signal degradation

Engineering Contradiction:
Improvetesting bandwidthVSAvoidsignal degradation
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The active probe card is introduced as a signal conditioning intermediary that actively manages bandwidth limitations. The amplification circuits extend the effective testing bandwidth by compensating for high-frequency signal losses that would otherwise limit the testing capability, allowing broader bandwidth testing without fundamentally changing the probe card architecture.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The active probe card significantly improves testing bandwidth and accuracy by amplifying signals and reducing noise interference, enabling faster and more precise high-speed circuit testing.

Implementation Method 1

an amplification circuit, formed on the printed circuit board and coupled to the at least one connection member for amplifying an input or output signal of the DUT

Methodology Applied
Scientific EffectSignal amplification:

Data Source

PatentUS9506974B2Active probe card
Publication Date: 2016.11.29 SYNC TECH SYST
  • US9506974B2 patent drawing
  • US9506974B2 patent drawing
  • US9506974B2 patent drawing

AI summary

An active probe card capable of improving testing bandwidth of a device under (DUT) test includes a printed circuit board; at least one probe needle, affixed to a first surface of the printed circuit board for probing the DUT; at least one connection member, electrically connected to the at least one probe needle; and an amplification circuit, formed on the printed circuit board and coupled to the at least one connection member for amplifying an input or output signal of the DUT.