Actuator Heat Transport Element for Lithography Imaging Quality
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Solution Overview
Problem
Projection exposure apparatuses for semiconductor lithography face challenges in maintaining optical imaging quality due to heat generated by actuator systems, which leads to thermal gradients and imaging aberrations.
Innovation Solution
Incorporating a heat transport element that dissipates waste heat from the actuator system outside the optical component, using fluid cooling or high thermal conductivity materials, and employing a control/regulating unit connected to acceleration sensors to manage heat input effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If actuator system is used for mechanical actuation of optical elements, then actuation capability and positioning precision are improved, but heat is generated that degrades optical imaging quality
Solution Approach 1:
The harmful heat is extracted from the actuator system and transported away from the optical element through a dedicated heat transport element, separating the beneficial mechanical actuation function from the harmful thermal effect
Solution Approach 2:
A heat transport element is introduced as an intermediary component between the actuator system and the optical element, which conducts heat away from the optical element while allowing the actuator to maintain its mechanical coupling for positioning
2Productivity
If actuator system operates at high capacity for faster actuation, then productivity is improved, but heat generation increases causing thermal gradients and imaging aberrations
Solution Approach 1:
The heat transport element is pre-installed and thermally coupled to the actuator system before operation, so that heat is continuously conducted away from the optical element during high-speed actuation, preventing thermal gradient formation
Solution Approach 2:
The heat transport mechanism operates continuously during actuator system operation, maintaining steady-state heat removal to prevent accumulation of thermal gradients even during high-capacity actuation
3Manufacturing precision
If heat is dissipated outside the optical component, then optical imaging quality is improved, but device complexity increases due to additional heat transport components
Solution Approach 1:
The heat transport element serves multiple functions: it conducts heat away from the optical element, provides thermal coupling for heat dissipation, and can be integrated with the existing actuator mounting structure, reducing overall system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces heating around optical components, allowing for higher actuation forces and speeds, improved damping of vibrations, and enhanced imaging quality by effectively managing heat dissipation and minimizing mechanical disturbances.
Implementation Method 1
the heat transport element is in thermal contact with the heated regions of the actuator system and is led toward the outside through the objective housing
Data Source
AI summary
The disclosure relates to a projection exposure apparatus for semiconductor lithography which includes an actuator system to mechanically actuate a component of the projection exposure apparatus. The actuator system has at least one mechanism to reduce and/or dampen the heat input into the component that is due to heat arising during the operation of the actuator system.