Actuator Lid Assembly Alignment for Process Uniformity
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Solution Overview
Problem
The precise control of process gas flow and uniformity in plasma process chambers is challenging, leading to dimensional non-uniformity errors in microlithography, which affects the manufacturing of electronic devices with smaller and more precise dimensions.
Innovation Solution
An alignment system employing actuators to provide relative displacement between the lid assemblies of process chambers and substrates, using brackets, interface members, and actuators to position the lid assembly relative to the substrate, improving process uniformity across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the process chamber uses fixed lid assembly positioning, then the device complexity is reduced, but the manufacturing precision deteriorates due to dimensional non-uniformity errors
Solution Approach 1:
The patent applies the dynamics principle by implementing actuators that enable the lid assembly to move dynamically relative to the substrate, transforming a static fixed-positioning system into a dynamic adjustable system. This allows real-time correction of dimensional non-uniformity errors while maintaining manufacturing precision, resolving the contradiction between reduced device complexity and improved manufacturing precision.
Solution Approach 2:
The patent replaces traditional mechanical alignment methods with actuator-based positioning systems that use controlled displacement mechanisms. This substitution enables more precise control of lid assembly position relative to the substrate, improving dimensional uniformity without proportionally increasing overall device complexity through sophisticated mechanical linkages.
2Manufacturing precision
If the lid assembly position is fixed relative to the substrate, then the ease of operation is improved, but the manufacturing precision deteriorates due to inability to correct uniformity errors
Solution Approach 1:
The patent implements self-service by enabling the alignment system to automatically adjust and correct positional errors between the lid assembly and substrate without requiring manual intervention. The actuators autonomously compensate for dimensional non-uniformity, maintaining manufacturing precision while preserving ease of operation through automated error correction.
3Manufacturing precision
If actuators are added to provide relative displacement between lid assembly and substrate, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The patent applies local quality by implementing actuators at specific critical locations where positional adjustment is most needed, rather than uniformly across the entire system. This targeted approach improves dimensional control precision at key interfaces between the lid assembly and substrate while minimizing the overall increase in device complexity by limiting actuator placement to essential areas only.
Data Source
AI summary
Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.