Actuator Linking Section Folding for Rigidity Control
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Solution Overview
Problem
Existing actuator devices in optical systems, such as those used in microlithography, face challenges in maintaining imaging accuracy and flexibility due to limitations in axial and transverse rigidity, especially at narrow geometric boundary conditions, leading to parasitic loads that introduce imaging errors.
Innovation Solution
The actuator device features an actuation unit with a linking section that increases its effective length by folding back, allowing for adjustable axial and transverse rigidity, and a fluidic actuation principle that modifies the effective length of the wall element confining the actuation chamber, enabling a higher range of displacement with reduced rigidity variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the actuation unit uses a conventional rigid structure, then the axial and transverse rigidity are high, but the flexibility to adjust rigidity and reduce parasitic loads is reduced
Solution Approach 1:
The actuation unit is divided into multiple sections (first section, second section, and linking section) with different rigidity characteristics. Each section can be independently designed to provide specific rigidity properties, allowing the overall structure to achieve both high rigidity where needed and flexibility where required for adjustment.
Solution Approach 2:
Different sections of the actuation unit are designed with locally optimized rigidity properties. The linking section, for example, has different axial and transverse rigidity compared to the first and second sections, creating local variations in mechanical properties to achieve both stability and adjustability.
2Length of moving object
If the effective length of the actuation unit is increased to reduce rigidity variations, then the range of displacement is increased, but the parasitic loads increase
Solution Approach 1:
The linking section is folded back along the actuator axis, creating a nested configuration where parts of the structure are arranged in a compact, overlapping manner. This nesting increases the effective length for displacement range while maintaining a compact overall footprint and reducing parasitic loads through optimized structural arrangement.
Solution Approach 2:
The linking section is folded back along the actuator axis, introducing a dimensional change from a linear extension to a folded configuration. This allows the effective length to be increased in terms of displacement capability while the physical footprint remains controlled, and the folded geometry inherently reduces parasitic loads by optimizing the load path.
3Adaptability or versatility
If the linking section has lower axial and transverse rigidity, then the flexibility to adjust rigidity is improved, but the stability of the actuation unit is reduced
Solution Approach 1:
The actuation unit is segmented into distinct sections with different rigidity characteristics. The first and second sections provide structural stability, while the linking section provides flexibility for adjustment. This segmentation allows each part to fulfill its specific function without compromising the overall system performance.
Solution Approach 2:
The linking section is designed with locally optimized rigidity properties that differ from the first and second sections. This local variation in quality allows the linking section to provide the necessary flexibility for rigidity adjustment while the other sections maintain structural stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design provides high flexibility in adjusting axial and transverse rigidity, allowing for increased displacement while maintaining low parasitic loads and imaging accuracy, thus reducing errors in optical systems.
Implementation Method 1
a fluidic actuation principle that modifies the effective length of the wall element confining the actuation chamber
Implementation Method 2
At least one of the first and second wall sections is at least partially shaped in the manner of a bellows
Data Source
AI summary
Actuator devices, as well as related systems and methods, are disclosed. In some embodiments, the devices, systems and methods are within the field of microlithography. In some embodiments, a system can include an optical element unit having an optical element, a support structure supporting the optical element, and an actuator device connected to the optical element and configured to exert an actuation force onto the optical element along a direction of actuation. The actuator device can include an actuation unit which includes a linking section that links first and second sections of the actuation unit.