Actuator Magnetic Member Positioning for Force Density
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Solution Overview
Problem
Lithographic apparatus actuators face challenges in achieving high acceleration levels while minimizing mass and parasitic forces, which affect the accuracy and efficiency of positioning devices.
Innovation Solution
The actuator design includes coil assemblies with a core chamber and a magnetic member made of magnetic material extending partly along the core chamber height, optimizing force density and reducing parasitic forces by selecting the magnetic member's shape, size, and position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the mass of the actuator is increased to achieve higher acceleration levels, then the acceleration capability is improved, but the force density decreases
Solution Approach 1:
The patent applies local quality by positioning magnetic members at specific locations within the core chamber rather than uniformly distributing them. The magnetic members are placed at locations where they most effectively interact with the coil assemblies to generate force, optimizing the local magnetic field distribution and improving force density without increasing overall actuator mass.
Solution Approach 2:
The patent changes physical parameters by optimizing the size, shape, and position of magnetic members within the core chamber. By adjusting these parameters, the actuator achieves higher force density and acceleration levels. The partial extension of magnetic members along the core chamber height is a specific parameter change that optimizes the balance between force generation and mass.
2Speed
If the actuator design is optimized for high acceleration, then the acceleration level is improved, but parasitic forces increase
Solution Approach 1:
The patent extracts or removes unnecessary magnetic material from the core chamber, keeping only the essential magnetic members that contribute to useful force generation. By taking out excess magnetic material and positioning only the necessary magnetic members, the design reduces parasitic forces while maintaining high acceleration capability.
Solution Approach 2:
The patent applies local quality by creating non-uniform magnetic field distribution through strategically positioned magnetic members. This localized approach ensures that magnetic forces are concentrated where needed for acceleration while minimizing parasitic forces in other regions of the core chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances force density and reduces parasitic forces, allowing for higher acceleration levels with improved efficiency and accuracy in positioning devices, as demonstrated by simulation results showing increased force density and reduced power dissipation.
Implementation Method 1
The actuator comprises coil assemblies arranged in an array, and at least one magnetic member that extends partly along the core chamber height
Data Source
AI summary
An actuator includes coil assemblies arranged in an array, wherein each coil assembly defines a core chamber having a core chamber height; and at least one magnetic member that extends partly along the core chamber height of the core chamber of a corresponding at least one coil assembly, wherein the at least one magnetic member is made of a magnetic material. A shape of the at least one magnetic member, a size of the at least one magnetic member, a position of the at least one magnetic member and/or the magnetic material of the at least one magnetic member may be selected so as to control one or more parameters of the actuator.