Actuator-Sensor Device with Segmented Support for Lithography Maintenance
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Solution Overview
Problem
Current actuator-sensor devices in lithography apparatuses require complex and time-consuming maintenance processes, as control units need to be removed for accessing and replacing actuator-sensor units, leading to increased downtime and maintenance costs.
Innovation Solution
An actuator-sensor device design where the actuator-sensor unit and control unit are supported by different sides of a supporting element, allowing for independent removal and replacement without disconnecting the electrical connection, enabling modular and efficient maintenance with reduced downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If control units are integrated in the housing from the same side as actuator-sensor units, then vacuum seals can be provided between actuator-sensor units and housing, but control units need to be removed first to access actuator-sensor units for repair/replacement
Solution Approach 1:
The housing is divided into a first housing part and a second housing part that can be separated from each other. The actuator-sensor units are arranged in the first housing part while control units are integrated in the second housing part. This segmentation allows the second housing part to be removed to access actuator-sensor units in the first housing part, resolving the contradiction between maintaining vacuum seal integrity and enabling easy repair access.
2Ease of manufacture
If control units and actuator-sensor units are arranged on the same side of housing, then integration is simplified, but maintenance time increases due to required disassembly
Solution Approach 1:
The housing is segmented into two separable parts: a first housing part containing actuator-sensor units and a second housing part containing control units. This segmentation maintains manufacturing simplicity through modular assembly while enabling rapid maintenance by allowing the second housing part to be quickly removed to access actuator-sensor units, thereby reducing maintenance time.
Solution Approach 2:
The control units are extracted into a separate second housing part that can be independently removed. This extraction allows maintenance personnel to access actuator-sensor units in the first housing part without having to disassemble the entire housing structure, significantly reducing maintenance time while preserving integration benefits.
3Device complexity
If actuator-sensor units and control units are supported on the same side of supporting element, then structural support is simplified, but replacement of either unit requires removal of the other
Solution Approach 1:
The supporting element is divided into a first supporting side and a second supporting side. Actuator-sensor units are supported on the first supporting side while control units are supported on the second supporting side. This segmentation enables independent replacement of actuator-sensor units or control units without requiring removal of the other, while maintaining relatively simple structural support through the divided configuration.
Data Source
AI summary
An actuator-sensor device for an optics module of a lithography apparatus comprises: an actuator-sensor unit having an actuator and a sensor; a control unit electrically connected to the actuator-sensor unit; and a support element which on a first supporting side of same supports the actuator-sensor unit and which on a second supporting side of same supports the control unit, with the second supporting side being opposite to the first supporting side.