Actuator Thermal Power Control in Microlithography

The patent applies periodic action by using oscillating actuator forces that alternate between tension and compression phases. This periodic loading pattern allows the system to maintain average positioning speed while the alternating force directions prevent sustained thermal gradients, thereby reducing transient thermal loads and associated mechanical deformations during fast positioning operations.

The patent changes the parameter of actuator force from static or monotonically varying to oscillating with controlled amplitude and frequency. By modulating the force parameters (magnitude, direction, timing) in an oscillatory manner, the system achieves fast positioning while the parameter variations prevent continuous thermal accumulation, thus resolving the contradiction between speed and thermal load.

The patent employs periodic oscillating forces where the actuator alternates between applying force in opposite directions. This periodic action enables the system to achieve high positioning accuracy through controlled oscillations while preventing sustained high thermal loads, as the alternating force directions allow thermal dissipation during each cycle, thus resolving the contradiction between accuracy and thermal load.

The patent applies preliminary anti-action by introducing counteracting oscillating forces that preemptively compensate for thermal effects. The oscillating actuator forces include phases where the force is reduced or reversed, creating a preemptive counter-action to thermal accumulation before it can cause significant deformations, thereby maintaining positioning accuracy without excessive thermal loads.

The patent extracts the thermal management function from separate cooling systems and integrates it into the actuation mechanism itself. By making the actuator forces oscillate rather than continuously apply load, the system inherently creates thermal cycles that promote heat dissipation, thereby achieving thermal stability without requiring additional cooling components or thermal isolation structures.

The patent enables the actuator to self-regulate its thermal impact through oscillating force application. The periodic reversal of actuator force directions automatically creates thermal cycles that facilitate heat dissipation, allowing the system to maintain thermal stability through its own operational characteristics rather than requiring external cooling systems, thus reducing device complexity.