Actuator Valve Device with Adjustable Piston Limit for Precise Flow Control
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Solution Overview
Problem
Existing valve devices in semiconductor manufacturing processes, particularly those using the atomic layer deposition method, face challenges in precisely adjusting gas flow rates and are susceptible to temperature fluctuations and frequent operation, leading to aging and requiring significant manual adjustments.
Innovation Solution
A valve device with an actuator that includes a piston housed in a housing with a supply port for pressurized fluid and an adjustable member that regulates the piston's upper limit position, allowing external adjustment of the flow rate through a lock mechanism and threaded member for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If pneumatic adjustment or mechanical adjustment is used in an air-driven valve, then the valve can be operated automatically, but it is not easy to precisely adjust the flow rate
Solution Approach 1:
A flow adjustment member is introduced as an intermediary component between the automated valve operation and the flow rate control. This member includes a regulating surface that can be adjusted independently of the automated operation mechanism, allowing precise flow rate adjustment while maintaining automatic operation capabilities. The regulating surface position directly controls the flow area, enabling precise flow rate control through mechanical positioning rather than relying solely on pneumatic or electrical signals.
2Productivity
If the valve is opened and closed at high frequency, then the productivity increases, but the valve readily ages and changes over time
Solution Approach 1:
The valve system incorporates dynamic adjustment capabilities through the flow adjustment member, which can be repositioned during operation to compensate for aging effects. The regulating surface can be dynamically adjusted to maintain precise flow rate control even as the valve components age from high-frequency operation. This dynamic adaptability extends the valve's service life and maintains reliability over time.
3Productivity
If the area around the processing chamber becomes high in temperature, then the processing efficiency improves, but the valve is readily affected by temperature
Solution Approach 1:
The valve system segments the flow control function from the actuation function. The flow adjustment member with its regulating surface handles the precise flow rate control independently from the automated actuation mechanism. This segmentation allows the flow control portion to be optimized for temperature stability while the actuation portion handles the high-frequency operation, thereby maintaining valve performance stability in high-temperature environments while preserving processing efficiency.
4Measurement precision
If manual flow adjustment is performed frequently, then the flow rate precision can be maintained, but significant man-hours are required
Solution Approach 1:
The flow adjustment member is designed with a lockable position setting mechanism that allows preliminary adjustment of the regulating surface position. Once adjusted to the desired flow rate, the position can be locked and maintained without requiring frequent manual interventions. This preliminary action capability reduces the time loss associated with frequent adjustments while maintaining flow rate precision throughout extended operation periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise adjustment of flow rates with reduced manual effort and improved resistance to temperature variations, enhancing the reliability and efficiency of gas control in semiconductor manufacturing systems.
Implementation Method 1
a supply port of a pressurized fluid provided to the housing
Implementation Method 2
the lock mechanism locks the position of the adjustment member by deforming the adjustment member screwed into the housing
Data Source
AI summary
To provide a valve device capable of easily and precisely adjusting a flow rate of a flowing fluid, and an actuator used in the valve device. The problem is solved by an actuator including pistons housed in a housing, a supply port of compressed air provided to a casing constituting the housing, and an adjustment member that is provided to a position separated from the supply port and regulates an upper limit position of possible movement of the piston that comes into contact with the adjustment member. The piston comes into contact with the adjustment member and is positioned in the upper limit position when compressed air is supplied through the supply port. The adjustment member s provided so as to allow adjustment of the upper limit position from outside the housing.