Adaptive Chuck Shape Control for Lithography Template Planarity
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Solution Overview
Problem
In nano-fabrication for integrated circuits, existing chucking systems fail to effectively adjust the shape of imprint lithography templates to maintain planarity, leading to image placement errors and particle defects, while direct contact with actuation systems can exacerbate these issues.
Innovation Solution
An adaptive chuck system with a detection system and processor is used to identify the shape of the template's active area, determining correspondence with the adaptive chuck's shape and adjusting it using piezoelectric actuators to achieve a target shape, minimizing contact and enhancing control and durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If direct contact with actuation system is used to adjust template shape, then shape control is improved, but template durability deteriorates and particle defects increase
Solution Approach 1:
The patent introduces an adaptive chuck as an intermediary component between the actuation system and the template. The chuck includes a compliant layer that indirectly transmits actuation forces to the template, avoiding direct contact between the actuation system and template. This resolves the contradiction by maintaining shape control through the compliant layer while preventing template damage and particle generation.
2Manufacturing precision
If actuation system adjusts template shape directly, then planarity control is improved, but image placement errors worsen due to contact-induced defects
Solution Approach 1:
The adaptive chuck serves as a mediator that transmits actuation forces without causing contact-induced defects. The compliant layer distributes forces uniformly and prevents direct mechanical contact that would generate particles and cause image placement errors, while still achieving the required planarity control.
3Stability of the object's composition
If rigid chucking system is used, then structural stability is improved, but template shape adjustment capability deteriorates
Solution Approach 1:
The adaptive chuck incorporates a compliant layer made of flexible material that can deform to match and control the template shape. This flexible structure provides both the stability needed for precise positioning and the adaptability required for shape adjustment, resolving the contradiction between rigidity and flexibility.
Solution Approach 2:
The chucking system transitions from a static rigid structure to a dynamic adaptive structure. The compliant layer can dynamically adjust its shape in response to actuation signals, enabling real-time template shape control while maintaining overall system stability through controlled compliance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the control and durability of the template shape, reducing planarity errors and image placement issues, while minimizing contact with the actuation system, thus enhancing the precision and reliability of nano-fabrication processes.
Implementation Method 1
Adjusting a length of a plurality of piezoelectric actuators of the actuation system to adjust the shape of the adaptive chuck
Data Source
AI summary
Methods, systems, and apparatus for of adjusting a shape of an imprint lithography template, including identifying a shape of an active area positioned on a first side of the template, the active area including patterning features; determining a correspondence between a shape of an adaptive chuck and the shape of the active area positioned on the first side of the template, the adaptive chuck coupled to a second side of the template, the second side opposite the first side of the template; and adjusting, by an actuation system coupled to the adaptive chuck, the shape of the adaptive chuck based on the correspondence to obtain a target shape of the active area positioned on the first side of the template.