Adaptive Control Law Selection for Asynchronous Plasma Actuators

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Solution Overview

Problem

Existing adaptive controllers struggle with nonlinear systems, lack stability and adaptability, and fail to handle asynchronous actuators in plasma processing systems, leading to inefficiencies and premature system failure due to overheating and energy waste.

Innovation Solution

An adaptive engine that splits control into estimation and control portions, using a nonlinear model with a bifurcated time-varying linear system to predict and adjust actuator outputs, minimizing nonlinear uncertainties through real-time adaptation of estimated model parameters.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If existing adaptive controllers are used to control plasma processing systems with asynchronous actuators, then the control system can handle multiple actuators, but the system lacks stability and adaptability, leading to premature failure and energy waste

Engineering Contradiction:
Improvesystem stabilityVSAvoidadaptability to asynchronous actuators
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The control system is segmented into multiple independent control loops, each dedicated to a specific actuator. Each control loop contains its own adaptive controller that independently manages one actuator's asynchronous behavior. This segmentation allows the system to handle the complexity of asynchronous actuators while maintaining overall stability, as each segment can adapt without affecting others.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The control system employs dynamic adaptation mechanisms where controller parameters are continuously adjusted based on real-time actuator responses. The adaptive controllers learn and adapt to the unique timing characteristics of each actuator, enabling the system to dynamically compensate for asynchronous behavior and maintain stability under varying operating conditions.

Inventive Principle:
Principle #15Dynamics

2Reliability

If the rail voltage is held at a high level for much of a pulse cycle to ensure sufficient power, then the actuators can respond adequately, but this leads to overheating of components and premature system failure

Engineering Contradiction:
Improveactuator response adequacyVSAvoidcomponent temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The control system performs preliminary actions by pre-charging capacitors and preparing actuators in advance of when power is actually needed. The adaptive controllers predict when actuators will need to respond and prepare the rail voltage accordingly, then quickly discharge only when necessary. This eliminates the need to maintain high rail voltage throughout the entire pulse cycle, reducing thermal stress on components.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system uses periodic pulsing of the rail voltage synchronized with the actual needs of the actuators. Instead of continuous high voltage, the rail is charged and discharged in periodic cycles that match the actuator firing patterns. This periodic action provides sufficient power for actuator responses while allowing thermal dissipation during off-periods, preventing overheating.

Inventive Principle:
Principle #19Periodic action

3Productivity

If the rail voltage is held at a high level continuously, then actuators can respond to any control signal, but this results in inefficiency since the rail is often far above the level needed at any moment in time

Engineering Contradiction:
Improveactuator response capabilityVSAvoidenergy dissipation
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The control system incorporates feedback mechanisms where the state of each actuator and the current power requirements are continuously monitored. The adaptive controllers use this feedback to dynamically adjust the rail voltage level, charging it only to the minimum necessary level required for upcoming actuator responses. This feedback-driven approach ensures the rail voltage is optimized for actual needs rather than maintaining a consistently high level, reducing energy waste.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically changes the rail voltage parameter based on real-time requirements. The adaptive controllers adjust the voltage level, charging rate, and discharge timing according to the specific needs of each actuator and the current process state. This parameter optimization allows the system to maintain adequate response capability while minimizing energy dissipation by avoiding unnecessarily high voltage levels.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS12386321B2Adaptive engine for tracking and regulation control using a control law selector and combiner
Publication Date: 2025.08.12 ADVANCED ENERGY IND INC
  • US12386321B2 patent drawing
  • US12386321B2 patent drawing
  • US12386321B2 patent drawing

AI summary

An adaptive engine and a method of adaptive control are disclosed. The method comprises receiving an input regressor, where the input regressor comprises a reference signal, a system output measurement, and a control output. The method includes applying one or more estimation laws to the input regressor to estimate two or more sets of estimated model parameter tensors, Θ; receiving two or more possible control signals; generating two or more estimated system outputs; and selecting a control signal from a set comprising at least the first possible control signal and the second possible control signal, or a combination of possible control signals blended from two or more of the sets.