Adaptive Multivariate Fault Detection Model for Drift Compensation

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Solution Overview

Problem

Conventional fault detection methods in manufacturing processes struggle to distinguish between normal drift and actual faults, leading to false alarms and missed detections due to cumulative computational rounding errors and inadequate adaptation of multivariate statistical models.

Innovation Solution

Adapting multivariate statistical models by adjusting univariate statistics within predetermined thresholds and employing multiple models with different adaptation strategies to detect both gradual and sudden faults, while preventing erroneous adaptations and resetting models after maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a static model is used to assume constant process conditions, then the model is simple to implement, but it cannot distinguish between expected changes over time and unexpected deviations caused by faults

Engineering Contradiction:
Improvemodel complexityVSAvoidfault detection accuracy
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent implements dynamic model adaptation by periodically updating the statistical model parameters (mean, covariance, principal components) based on recent process data. This allows the model to adapt to normal process drift while maintaining the ability to detect faults that deviate from the adapted baseline, resolving the contradiction between model simplicity and detection accuracy.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the parameters of the statistical model (mean vector, covariance matrix, principal component loadings) over time through periodic adaptation. By updating these parameters to reflect current process conditions, the model maintains accuracy in distinguishing normal drift from faults without requiring overly complex structures.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the control limit is set wide to accommodate process drift, then false alarms are reduced, but subtle faults may fail to be detected

Engineering Contradiction:
Improvefalse alarm reductionVSAvoidfault detection sensitivity
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent dynamically adjusts the control model through periodic adaptation, allowing the control limits to be tight relative to the current process variability. As the model adapts to normal drift, the control limits naturally adjust to accommodate the new baseline, maintaining high sensitivity to subtle faults while preventing false alarms from normal variation.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent performs preliminary model adaptation using historical and recent process data before establishing control limits. This preliminary action ensures that the control model reflects normal process behavior including expected drift, allowing subsequent fault detection to be sensitive to deviations from this adapted baseline without triggering false alarms.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If periodic model adaptation is performed to respond to process drift, then the model remains relevant over time, but cumulative computational rounding errors cause inaccurate statistical values

Engineering Contradiction:
Improvemodel adaptability to driftVSAvoidstatistical value accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent implements feedback mechanisms to monitor the quality of model adaptation and detect when cumulative rounding errors may be affecting statistical values. By monitoring model performance and adaptation trends, the system can identify when re-initialization or error correction is needed, maintaining both adaptability and numerical accuracy over extended operation periods.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent periodically discards accumulated model parameters and re-initializes the statistical model from scratch using recent process data. This recovery approach eliminates cumulative computational rounding errors that build up during prolonged adaptation, ensuring statistical accuracy is maintained while preserving the model's ability to adapt to process drift through fresh parameter estimation.

Inventive Principle:
Principle #34Discarding and recovering

Data Source

PatentUS7587296B2Adaptive multivariate fault detection
Publication Date: 2009.09.08 APPLIED MATERIALS INC
  • US7587296B2 patent drawing
  • US7587296B2 patent drawing
  • US7587296B2 patent drawing

AI summary

A method and apparatus for detecting faults. A set of data samples is received, the set of data samples including multiple process variables. One or more multivariate statistical models are adapted, wherein adapting includes applying a change to at least one univariate statistic of the one or more multivariate statistical models if the change is greater than a threshold value. The one or more multivariate statistical models are used to analyze subsequent process data to detect faults.