Adaptive Charged Particle Imaging with Variable Dwell-Time Scanning
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Solution Overview
Problem
Current charged particle microscope systems face challenges in efficiently evaluating atoms and nanoparticles due to size limitations, leading to irrelevant data collection, sample damage, and inaccuracies from repetitive scans, which are time-consuming and prone to drift issues.
Innovation Solution
The implementation of a method for drift-corrected, fast, low-dose, adaptive sample imaging using a charged particle microscopy system, which involves scanning a sample with a charged particle beam to obtain an initial image, determining a customized scan strategy with varying dwell times for regions of interest and non-interest, and adjusting the beam path to minimize sample damage and maximize data collection efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If current charged particle microscope systems scan the entire area with uniform beam dwell time to obtain statistically significant data, then measurement precision is improved, but loss of time increases significantly (hours or days)
Solution Approach 1:
The patent applies local quality by implementing variable beam dwell times across different regions of the sample. Regions containing atoms or nanoparticles of interest receive longer dwell times to collect statistically significant data, while regions without such structures receive shorter or zero dwell times. This spatially differentiated approach maintains measurement precision for target structures while dramatically reducing total scanning time by eliminating wasted beam time on irrelevant areas.
2Object-affected harmful factors
If beam strength and dwell time are reduced to minimize sample damage, then object-affected harmful factors are reduced, but measurement precision deteriorates due to insufficient data collection
Solution Approach 1:
The patent resolves this contradiction by applying local quality through spatially selective beam parameters. The beam strength and dwell time are locally optimized: high beam strength and longer dwell times are applied only to regions containing atoms or nanoparticles of interest where data collection is necessary, while regions without such structures receive minimal or no beam exposure. This approach minimizes sample damage overall while ensuring sufficient data collection for scientific analysis.
3Measurement precision
If repetitive scans are conducted to obtain statistically significant data, then measurement precision is improved, but reliability deteriorates due to drift and inaccuracies between scan instances
Solution Approach 1:
The patent applies preliminary action by performing drift correction and determining variable dwell time strategies before conducting the actual data collection scans. The system first identifies regions of interest and calculates optimal beam parameters, then executes the scanning with pre-planned variable dwell times. This preliminary planning eliminates the need for multiple repetitive scans with drift issues, as the correct data is collected in fewer scans with optimized parameters determined in advance.
4Measurement precision
If magnification is increased to resolve smaller atomic structures, then measurement precision is improved, but loss of time increases due to scanning spaces between atoms
Solution Approach 1:
The patent resolves this contradiction by applying local quality through spatially selective scanning. At high magnification settings, the system identifies and targets only the specific atomic or nanoparticle structures of interest, applying beam exposure only to those localized regions. The majority of the field of view that corresponds to voids or non-target structures receives minimal or zero beam exposure. This allows high-resolution imaging of atoms and nanoparticles without the penalty of scanning and wasting time on the surrounding empty space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces scanning time and sample damage by up to a factor of 600, allowing for more accurate and efficient evaluation of atomic and nanoparticle samples, enabling the acquisition of previously unattainable results with reduced repetition and improved data alignment.
Implementation Method 1
scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality
Data Source
AI summary
Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.